A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 185-193

  Bruschi, P ^a   Nannini, A ^a   Paci, D ^a,b   Pieri, F ^a  

^a UNIVERSITY OF PISA   (Italy)

^b CNR   (Italy)

Author keywords

Cross sensitivity; Electronic interfaces; MEMS accelerometers; Pull in voltage

Indexed keywords

FREQUENCY RESPONSE; NETWORKS (CIRCUITS); NONLINEAR SYSTEMS; RESONANCE; SENSITIVITY ANALYSIS; VOLTAGE MEASUREMENT;

BIAS VOLTAGE; CROSS-SENSITIVITY; DIFFERENTIAL MEASUREMENT; PULL-IN VOLTAGE MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 24944528617     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.028     Document Type: Conference Paper

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