Mold design and fabrication for surface relief gratings by glass nanoimprint

Japanese Journal of Applied Physics

Volumn 48, Issue 6 PART 2, 2009, Pages

  Mori, Toshiharu ^a   Kimoto, Yoshihisa ^b   Kasa, Haruya ^c   Kintaka, Kenji ^c   Hotou, Norihito ^b   Nishii, Junji ^c   Hirai, Yoshihiko ^b  

^a Konica Corporation   (Japan)

^b Osaka City University   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS SURFACES; HIGH ASPECT RATIO; MOLD DESIGNS; NANO-IMPRINT; PERIODIC GROOVES; SIMULATED RESULTS; SURFACE RELIEF GRATINGS;

DENTISTRY; GLASS; MOLDS; PRESSURE DROP;

ASPECT RATIO;

EID: 70249131839     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.06FH20     Document Type: Article

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