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Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 1, 2008, Pages 4746-4750

Glass imprinting process for fabrication of sub-wavelength periodic structures

(6) Mori, Toshiharu a Hasegawa, Kento a Hatano, Takuji a Kasa, Haruya b Kintaka, Kenji b Nishii, Junji b

a Konica Corporation (Japan)

b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Glass; Grating; Imprinting; Molding; Sub wavelength

Indexed keywords

FABRICATION; FORMING; PRESSING (FORMING);

CONSTANT PRESSURES; GLASSY CARBONS; GRATING; GROOVE DEPTHS; IMPRINTING; IMPRINTING PROCESSES; PHASE RETARDATIONS; PHOSPHATE GLASSES; POLARIZED LIGHT; RIGOROUS COUPLED WAVES; SOFTENING TEMPERATURES; SUB-WAVELENGTH; SURFACE-RELIEF GRATINGS; TRANSVERSE ELECTRICS; TRANSVERSE MAGNETIC; VISIBLE WAVELENGTHS;

GLASS;

EID: 55049101236 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.4746 Document Type: Article

Times cited : (20)

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