High-efficiency transmission gratings buried in a fused-SiO2 glass plate

Applied Optics

Volumn 43, Issue 6, 2004, Pages 1327-1330

  Nishii, Junji ^a   Kintaka, Kenji ^a   Nakazawa, Tatsuhiro ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Osaka Laboratory   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DRY ETCHING; ELECTRON BEAMS; FUSED SILICA; INDUCTIVELY COUPLED PLASMA; LIGHT POLARIZATION; LIGHT TRANSMISSION; OPTICAL DESIGN; OPTICAL GLASS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; THIN FILMS;

BINARY GRATINGS; COUPLED WAVE ANALYSIS; FIRST ORDER DIFFRACTION EFFICIENCY; TRANSMISSION GRATINGS;

DIFFRACTION GRATINGS;

EID: 1542306842     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.001327     Document Type: Article

References (8)

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