Fabrication of 14 wave plate by nanocasting lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2939-2943

  Yoshikawa, Takashi ^a   Konishi, Takaaki ^a   Nakajima, Masaki ^a   Kikuta, Hisao ^a   Kawata, Hiroaki ^a   Hirai, Yoshihiko ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CASTING; DIFFRACTION GRATINGS; LITHOGRAPHY; NANOTECHNOLOGY; POLYMERS;

MICROPILLARS; NANOCASTING LITHOGRAPHY; NANOGRATINGS; WAVE PLATES;

NANOSTRUCTURED MATERIALS;

EID: 29044449854     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2127953     Document Type: Article

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