White-light spectral interferometry and reflectometry to measure thickness of thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7389, Issue , 2009, Pages

  Hlubina, P ^a   Lunacek J ^a   Ciprian, D ^a  

^a VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

Michelson interferometer; Nonlinear like phase; Reflectance; Reflectometry; Spectral interferometry; Thickness; Thin film

Indexed keywords

NONLINEAR-LIKE PHASE; REFLECTANCE; REFLECTOMETRY; SPECTRAL INTERFEROMETRY; THICKNESS;

FILM THICKNESS; MICHELSON INTERFEROMETERS; OPTICAL CONSTANTS; OPTICAL DATA PROCESSING; OPTICAL INSTRUMENTS; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; REFLECTION; REFLECTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; THICKNESS MEASUREMENT; THIN FILM DEVICES; THIN FILMS;

INTERFEROMETRY;

EID: 69949142554     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.824545     Document Type: Conference Paper

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