Effects of phase changes on reflection and their wavelength dependence in optical profilometry

Applied Optics

Volumn 36, Issue 28, 1997, Pages 7157-7161

  Doi, Takuma ^a   Toyoda, Kouji ^a   Tanimura, Yoshihisa ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Phase change; Phase shifting interferometer; Surface profilometry

Indexed keywords

EID: 0000399243     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.007157     Document Type: Article

References (12)

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