Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer

Applied Physics B: Lasers and Optics

Volumn 88, Issue 3, 2007, Pages 397-403

  Hlubina, P ^a   Ciprian, D ^a   Lunacek J ^a   Chlebus, R ^a  

^a VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISPERSIONS; FOURIER TRANSFORMS; INTERFEROMETERS; OPTICAL CONSTANTS; SIGNAL INTERFERENCE; SILICA; THIN FILMS; WAVELENGTH;

MEASURE THICKNESS; PHASE RETRIEVAL; PHASE RETRIEVED;

SILICON WAFERS;

EID: 34548105902     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-007-2709-4     Document Type: Article

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