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Volumn 48, Issue 5, 2009, Pages 985-989

Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement

Author keywords

[No Author keywords available]

Indexed keywords

ALGEBRA; FILM THICKNESS; REFLECTION; SUBSTRATES;

EID: 61449242890     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.000985     Document Type: Article
Times cited : (36)

References (14)
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  • 4
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    • Effects of dispersion on the determination of optical constants of thin films
    • C. K. Carniglia, "Effects of dispersion on the determination of optical constants of thin films," Proc. SPIE 652, 158-165 (1986).
    • (1986) Proc. SPIE , vol.652 , pp. 158-165
    • Carniglia, C.K.1
  • 5
    • 84906316541 scopus 로고    scopus 로고
    • R. and G. A. J. Amaratunga, Determination of the optical constants and thickness of thin films on slightly absorbing substrates, Appl. Opt. 34, 7914-7924 (1995).
    • R. and G. A. J. Amaratunga, "Determination of the optical constants and thickness of thin films on slightly absorbing substrates," Appl. Opt. 34, 7914-7924 (1995).
  • 6
    • 0035858567 scopus 로고    scopus 로고
    • Determination of thicknesses and spectral dependences of refractive indices of non-absorbing and weakly absorbing thin films using the wavelengths related to extrema in spectral reflectances
    • I. Ohlidal, D. Franta, M. Ohlidal, and K. Navratil, "Determination of thicknesses and spectral dependences of refractive indices of non-absorbing and weakly absorbing thin films using the wavelengths related to extrema in spectral reflectances," Vacuum 61, 285-289 (2001).
    • (2001) Vacuum , vol.61 , pp. 285-289
    • Ohlidal, I.1    Franta, D.2    Ohlidal, M.3    Navratil, K.4
  • 7
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    • Direct calculation of the optical constants for a thin film using a midpoint envelope
    • S. Humphrey, "Direct calculation of the optical constants for a thin film using a midpoint envelope," Appl. Opt. 46, 4660-4666 (2007).
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    • Humphrey, S.1
  • 8
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    • Determination of optical parameters for amorphous thin film materials on semitransparent substrates from transmittance and reflectance measurements
    • O. Stenzel, V. Hopfe, and P. Klobes, "Determination of optical parameters for amorphous thin film materials on semitransparent substrates from transmittance and reflectance measurements," J. Phys. D 24, 2088-2094 (1991).
    • (1991) J. Phys. D , vol.24 , pp. 2088-2094
    • Stenzel, O.1    Hopfe, V.2    Klobes, P.3
  • 9
    • 47749141079 scopus 로고    scopus 로고
    • Spectral interferometry and reflectometry used to measure thin films
    • P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, "Spectral interferometry and reflectometry used to measure thin films," Appl. Phys. B 92, 203-207 (2008).
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    • Hlubina, P.1    Luňáček, J.2    Ciprian, D.3    Chlebus, R.4
  • 10
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    • Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film
    • P. Hlubina, D. Ciprian, J. Luňáček, and M. Lesňák, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678-7685 (2006).
    • (2006) Opt. Express , vol.14 , pp. 7678-7685
    • Hlubina, P.1    Ciprian, D.2    Luňáček, J.3    Lesňák, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.