Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film

Optics Express

Volumn 14, Issue 17, 2006, Pages 7678-7685

  Hlubina, P ^a   Ciprian, D ^a   Lunacek J ^a   Lesnak M ^a  

^a VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION (WAVES); MIRRORS; OPTICAL BEAM SPLITTERS; SILICON WAFERS; THICKNESS MEASUREMENT; THIN FILMS;

MICHELSON INTERFEROMETER; OPTICAL CONSTANTS; OPTICAL PATH DIFFERENCE (OPD); PHASE RETRIEVAL;

INTERFEROMETRY;

EID: 33747777746     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.007678     Document Type: Conference Paper

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