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Volumn 40, Issue 34, 2001, Pages 6223-6228

Dispersion error in white-light linnik interferomseters and its implications for evaluation procedures

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DIFFRACTIVE OPTICS; ELECTROMAGNETIC DISPERSION; ERROR ANALYSIS; OPTICAL DEVICES;

EID: 0037811964     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.006223     Document Type: Article
Times cited : (104)

References (10)
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    • Dresel, T.H.1    Hausler, G.2    Venzke, H.3
  • 3
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    • Sandoz, P.1    Tribillon, G.2
  • 4
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    • What is frequency domain analysis
    • PdG 9/93 (Zygo Corp., Middlefield, Conn.,)
    • Zygo Corporation, “What is frequency domain analysis,” R&D Tech. Bull. PdG 9/93 (Zygo Corp., Middlefield, Conn., 1993).
    • (1993) R&D Tech. Bull.
  • 5
    • 0001363526 scopus 로고    scopus 로고
    • Improved verticalscanning interferometry
    • A. Harasaki, J. Schmidt, and J. C. Wyant, “Improved verticalscanning interferometry,” Appl. Opt. 39, 2107-2115 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 2107-2115
    • Harasaki, A.1    Schmidt, J.2    Wyant, J.C.3
  • 6
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    • Beamsplitter cube for white light interferometry
    • K. B. Farr and N. George, “Beamsplitter cube for white light interferometry,” Opt. Eng. 31, 2191-2196 (1992).
    • (1992) Opt. Eng. , vol.31 , pp. 2191-2196
    • Farr, K.B.1    George, N.2
  • 7
    • 0028479462 scopus 로고
    • Dispersive interferometric pro-filometer
    • J. Schwider and L. Zhou, “Dispersive interferometric pro-filometer,” Opt. Lett. 19, 995-997 (1994).
    • (1994) Opt. Lett. , vol.19 , pp. 995-997
    • Schwider, J.1    Zhou, L.2
  • 8
    • 84906876958 scopus 로고
    • Surface profiling by analysis of white-light interferograms in the spatial frequency domain
    • P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389 -401 (1995).
    • (1995) J. Mod. Opt. , vol.42
    • De Groot, P.1    Deck, L.2
  • 9
    • 0000546959 scopus 로고    scopus 로고
    • Offset of coherent envelope position due to phase change on reflection
    • A. Harasaki, J. Schmidt, and J. C. Wyant, “Offset of coherent envelope position due to phase change on reflection,” Appl. Opt. 40, 2102-2106 (2001).
    • (2001) Appl. Opt. , vol.40 , pp. 2102-2106
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.