Sulfonium salts of alicyclic group functionalized semifluorinated alkyl ether sulfonates as photoacid generators

Chemistry of Materials

Volumn 21, Issue 17, 2009, Pages 4037-4046

  Yi, Yi ^a   Ayothi, Ramakrishnan ^a   Wang, Yueh ^b   Li, Mingqi ^c   Barclay, George ^c   Sierra Alvarez, Reyes ^d   Ober, Christopher K ^a  

^a School of Operations Research and Industrial Engineering   (United States)

^b INTEL CORPORATION   (United States)

^c DOW CHEMICAL COMPANY   (United States)

^d University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

193-NM IMMERSION; 193-NM LITHOGRAPHY; ALKYL ETHERS; ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; BUTYROLACTONES; ENVIRONMENTAL PROBLEMS; ENVIRONMENTALLY-FRIENDLY; EXTREME ULTRAVIOLETS; FUNCTIONALIZED; HIGH PURITY; HIGH RESOLUTION LITHOGRAPHY; HIGH YIELD; OPTICAL AND THERMAL PROPERTIES; PHOTOACID GENERATORS; POLAR SOLVENTS; POSITIVE-TONE RESISTS; SUB-100 NM; SULFONATE ANION; SULFONIUM SALTS; THERMAL STABILITY;

ETHERS; GLUCOSE; HEAT SHIELDING; LIGHT WEIGHT ROLLING STOCK; OPTICAL PROPERTIES; PHOTORESISTORS; PLASTIC FILMS; SALTS; THERMODYNAMIC PROPERTIES; ULTRAVIOLET DEVICES; X RAY PHOTOELECTRON SPECTROSCOPY;

POLYMER FILMS;

EID: 69849112073     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm901366r     Document Type: Article

References (36)

1. Shirai, M.; Tsunooka, M. Prog. Polym. Sci. 1996, 21, 1.
2. Crivello, J. V. J. Polym. Sci., Part A: Polym. Chem. 1999, 37, 4241.
3. Ito, H. J. Polym. Sci., Part A: Polym. Chem. 2003, 41, 3863.
4. Ito, H. Adv. Polym. Sci. 2005, 172, 37.
5. Serafinowski, P. J. Garland, P. B. J. Am. Chem. Soc. 2003, 125, 962.
6. Zhou, W.; Kuebler, S. M.; Braun, K. L.; Yu, T.; Cammack, J. K.; Ober, C. K.; Perry, J. W.; Marder, S. R. Science 2002, 296, 1106.
7. Menard, E.; Meitl, M. A.; Sun, Y.; Park, J.-U.; Shir, D. J.-L.; Nam, Y.-S.; Jeon, S.; Rogers, J. A. Chem. Rev. 2007, 107, 1117.
8. Doshi, D. A.; Huesing, I. K.; Lu, M.; Fan, H.; Lu, Y.; Simmons-Potter, K.; Potter, B. G.; Hurd, A. J.; Brinker, J. Science 2000, 290, 107.
9. Kannan, K.; Koistinen, J.; Beckmen, K.; Evans, T.; Gorzelany, J. F.; Hansen, K. J.; Jones, O. P. D.; Helle, E.; Nyman, M.; Giesy, J. P. Environ. Sci. Technol. 2001, 35, 1593.
10. Kannan, K.; Newsted, J.; Halbrook, R. S.; Giesy, J. P. Environ. Sci. Technol. 2002, 36, 2566.
11. Kannan, K.; Newsted, J.; Halbrook, R. S.; Giesy, J. P. Environ. Sci. Technol. 2004, 38, 1264.
12. Lamanna, W. M.; Kessel, C. R.; Savu, P. M.; Cheburkov, Y.; Brinduse, S.; Kestner, T. A.; Lillquist, G. J.; Parent, M. J.; Moorhouse, K. S.; Zhang, Y.; Birznieks, G.; Kruger, T.; Pallazzotto, M. C. Proc. SPIE 2002, 4690, 817.
13. Asakura, T.; Yamato, H.; Matsumoto, A.; Murer, P.; Ohwa, M. J. Photopolym. Sci. Technol. 2003, 16, 335.
14. Ayothi, R.; Yi, Y.; Cao, H. B.; Wang, Y.; Putna, S.; Ober, C. K. Chem. Mater. 2007, 19, 1434.
15. Wu, H.; Gonsalves, K. E. Adv. Funcnl. Mater. 2001, 11, 271.
16. Wang, M.; Jarnagin, N. D.; Lee, C.-T.; Henderson, C. L.; Wang, Y.; Roberts, J. M.; Gonsalves, K. E. J. Mater. Chem. 2006, 16, 3701.
17. Wang, M.; Gonsalves, K. E.; Rabinovich, M.; Wang, Y.; Roberts, J. M. J. Mater. Chem. 2007, 17, 1699.
18. Imazeki, S.; Sumino, M.; Fukasawa, K.; Ishihara, M.; Akiyama, T. Synthesis 2004, 10, 1648.
19. Wang, Y.; Cao, H. B.; Thirumala, V.; Choi, H. Proc. SPIE 2005, 5753, 765.
20. Feiring, A. E. J. Org. Chem. 1985, 50, 3269.
21. Zou, X.;Wu, F. Shen, Y.; Xu, S.; Huang, W. Tetrahedron 2003, 59, 2555.
22. Huang, W.-Y.; Wu, F.-H. Israel J. Chem. 1999, 39, 167.
23. Crivello, J. V.; Lam, J. H. W. Macromolecules 1977, 10, 1307.
24. Sinnott M. L. Carbohydrate Chemistry and Biochemistry: Structure and Mechanism; Royal Society of Chemistry: Cambridge, 2007.
25. Shi, X. J. Vac. Sci. Technol. B 1999, 17, 350.
26. Stewart, M. D.; Tran, H. V.; Schmid, G. M.; Stachowiak, T. B.; Becker, D. J.; Willson, C. G. J. Vac. Sci. Technol. B 2002, 20, 2946.
27. Cronin, M. F.; Adams, T.; Fedynyshyn, T.; Georger, J.; Mori, J. M.; Sinta, R.; Thackeray, J. W. Proc. SPIE 1994, 2195, 214.
28. Barclay, G. G.; Medeiros, D. R.; Sinta, R. F. Chem. Mater. 1995, 7, 1315.
29. Hirayama, T.; Shiono, D.; Matsumaru, S.; Ogata, T.; Hada, H.; Onodera, J.; Arai, T.; Sakamizu, T.; Yamaguchi, A.; Shiraishi, H.; Fukuda, H.; Ueda, M. Jpn. J. Appl. Phys. 2005, 44, 5484.
30. Krautter, H. W.; Houlihan, F. M.; Hutton, R. S.; Rushkin, I. L.; Opila R. L. Proc. SPIE 2000, 3999, 1070.
31. Sundararajan N.; Keimel C. F.; Bhargava N.; Ober C. K. Opitz J.; Allen, R. D.; Barclay, G.; Xu, G. J. Photopolym. Sci. Technol. 1999, 12, 457.
32. Hirayama, T.; Shiono, D.; Onodera, J.; Yamaguchi, A.; Fukuda, H. Polym. Adv. Technol. 2006, 17, 116.
33. Ito, H.; Breyta, G.; Hofer, D.; Sooriyakumaran, R.; Petrillo, K.; Seeger, D. J. Photopolym. Sci. Technol. 1994, 7, 433.
34. Nozaki, K.; Yano, E. J. Photopolym. Sci. Technol. 1997, 10, 545.
35. Dean, K. R.; Gonsalves, K. E.; Thiyagarajan, M. Proc. SPIE 2006, 6153, 61531E.
36. Chauhan, M. M.; Nealey, P. J. J. Vac. Sci. Technol. B 2000, 18, 3402.