New ionic photo-acid generators (PAGs) incorporating novel perfluorinated anions

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4690 II, Issue , 2002, Pages 817-828

  Lamanna, William M ^a   Kessel, Carl R ^a   Savu, Pat M ^a   Cheburkov, Yuri ^a   Brinduse, Steve ^a   Kestner, Thomas A ^a   Lillquist, Gerald J ^a   Parent, Mike J ^a   Moorhouse, Karrie S ^a   Zhang, Yifan ^a   Birznieks, Grant ^a   Kruger, Terry ^a   Pallazzotto, Michael C ^a  

^a 3M COMPANY   (United States)

Author keywords

Fluorinated anions; Imide; Iodonium; Ionic PAGs; Methide; Photo acid generators; Sulfonium

Indexed keywords

ACTIVATION ENERGY; MONOMERS; NEGATIVE IONS; PHOTOLYSIS; POLYMERIZATION; SALTS; SEMICONDUCTOR DEVICE MANUFACTURE;

PHOTOACID GENERATORS (PAG);

PHOTORESISTS;

EID: 0141732620     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474284     Document Type: Article

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