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Volumn 4690 II, Issue , 2002, Pages 817-828
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New ionic photo-acid generators (PAGs) incorporating novel perfluorinated anions
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Author keywords
Fluorinated anions; Imide; Iodonium; Ionic PAGs; Methide; Photo acid generators; Sulfonium
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Indexed keywords
ACTIVATION ENERGY;
MONOMERS;
NEGATIVE IONS;
PHOTOLYSIS;
POLYMERIZATION;
SALTS;
SEMICONDUCTOR DEVICE MANUFACTURE;
PHOTOACID GENERATORS (PAG);
PHOTORESISTS;
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EID: 0141732620
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.474284 Document Type: Article |
Times cited : (24)
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References (22)
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