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Volumn 4690 II, Issue , 2002, Pages 817-828

New ionic photo-acid generators (PAGs) incorporating novel perfluorinated anions

Author keywords

Fluorinated anions; Imide; Iodonium; Ionic PAGs; Methide; Photo acid generators; Sulfonium

Indexed keywords

ACTIVATION ENERGY; MONOMERS; NEGATIVE IONS; PHOTOLYSIS; POLYMERIZATION; SALTS; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0141732620     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474284     Document Type: Article
Times cited : (24)

References (22)
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  • 2
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    • Dominey, L.A.1
  • 8
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    • Lamanna, W., et. al., US 5,554,664.
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  • 19
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.