Effect of gas pressure on the lifetime of capacitive RF MEMS switches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 890-893

  Czarnecki, P ^a,b   Rottenbers, X ^a,b   Puers, R ^b   De Wolf, I ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC DISCHARGES; ELECTRIC INSULATORS; ELECTRODES; ELECTRON EMISSION; MICROELECTROMECHANICAL DEVICES;

ELECTRIC STRENGTH; ELECTRODE-GAP BREAKDOWN; GAS PRESSURE; INSULATOR CHARGING;

ELECTRIC SWITCHES;

EID: 33750143099     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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