Influence of the substrate on the lifetime of capacitive RF MEMS switches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 172-175

  Czarnecki, P ^a,b   Rottenberg, X ^a,b   Soussan, P ^a   Ekkels, P ^a,b   Muller, P ^a   Nolmans, P ^a   De Raedt, W ^a   Tilmans, H A C ^a   Puers, R ^b   Marchand, L ^c   De Wolf, I ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; REACTIVE ION ETCHING; SWITCHES; TIME SWITCHES;

DC VOLTAGES; DIFFERENT SUBSTRATES; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; PULL-IN; PULL-IN VOLTAGES; RF-MEMS SWITCHES; SUBSTRATE CHARGING;

SUBSTRATES;

EID: 50149108184     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443620     Document Type: Conference Paper

References (13)

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