New insights into charging in capacitive RF MEMS switches

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2008, Pages 496-505

  Czarnecki, P ^a,b   Rottenberg, X ^a,b   Soussan, P ^a   Nolmans, P ^a   Ekkels, P ^a,b   Muller, P ^a   Tilmans, H A C ^a   De Raedt, W ^a   Puers, R ^b   Marchand, L ^c   De Wolf, I ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

Capacitive RF MEMS switch; Dielectric charging; Reliability

Indexed keywords

CHARGE TRAPPING; ELECTRIC CHARGE; ELECTRIC SWITCHES; ELECTROSTATICS; MECHANISMS; MICROELECTROMECHANICAL DEVICES; RELIABILITY;

CAPACITIVE RF MEMS SWITCH; DIELECTRIC CHARGING; RF-MEMS SWITCHES;

MEMS;

EID: 51549118093     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2008.4558936     Document Type: Conference Paper

References (16)

1. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, M. Eberly, "Lifetime characterization of capacitive RF MEMS switches", in 2001 IEEE MMT-S Int. Microwave Symp. Dig., vol.1, May 2001, pp. 227-230.
2. J.R. Reid, R.T. Webster, "Measurements of charging in capacitive microelectromechanical switches", in Electronics Letters, vol. 38, No.24, November 2004, pp. 1544-1545.
3. P. Czarnecki, X. Rottenberg, B. Puers and I. De Wolf, "Impact of Biasing Scheme and Environment Conditions on the lifetime of RF-MEMS Capacitive Switches", 6th Workshop on MEMS for MillimeterWAVE Communications (MEMSWAVE 2005), pp. 133-136, Lausanne, Switzerland, 27-28 June, 2005.
4. X. Rottenberg, I. De Wolf, B. Nauwelaers, W. De Raedt and H. A. C. Tilmans, "Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beams", 6th Workshop on MEMS for MillimeterWAVE Communications (MEMSWAVE 2005), pp. 101, Lausanne, Switzerland, 27-28 June, 2005.
5. W. M. van Spengen, R. Puers, R. P. Mertens and I. De Wolf, "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches", Journal of Micromechanics and Microengineering, 14, 2004, 514-521.
6. X. Rottenberg, S. Brebels, P. Ekkels, P. Czarnecki, P. Nolmans, R.P. Mertens, B. Nauwelaers, R. Puers, I. De Wolf, W. De Raedt and H.A.C. Tilmans, "An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin film RF-MEMS technology", J. Micromech. Microeng. 17, (2007), pp. 204-210.
7. P. Czarnecki, et al., "Influence of the Substrate on the Lifetime of Capacitive RF MEMS Switches", proc. of MEMS 2008.
8. http://www.ansoft.com
9. X. Rottenberg, I. De Wolf, B.K.J.C Nauwelaers, W. De Raedt and H. A.C. Tilmans, "Analytical model of the DC actuation of electrostatic MEMS devices with distributed dielectric charging and nonplanar electrodes", JMEMS, vol. 16(5), pp. 1243-1253, October 2007.
10. P. Czarnecki, et al. "Effect of Gas Pressure on the Lifetime of Capacitive RF MEMS Switches", proc. of MEMS 2006.
11. Z. Peng, X. Yuan, J.C.M. Hwang, D.I. Forehand, C.L. Goldsmith, "Dielectric charging of RF MEMS capacitive Switches under bipolar control-voltage waveforms", in 2007 Intl Microwave Symp Dig., June 2007, pp. 1817-1820
12. H. Yamazaki, T. Ikehashi, T. Ohguro, E. Ogawa, K. Kojima, K. Ishimaru, H. Ishiuchi, "An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors", in Sensors and Actuators A 139, 2007, pp. 233-236.
13. S. Melle, et al. "Reliability modeling of capacitive RF MEMS switches", IEEE Transactions on Microwave Theory and Techniques, Vol. 53, No. 11, November 2005, pp. 3482-3488.
14. R.W. Herfst, et al. "Characterization of dielectric charging in RF MEMS capacitive switches", IEEE International Conference on Microelectronic Test Structures, March 2006, pp. 133-136.
15. X. Yuan, et al. "Acceleration of dielectric charging in RF MEMS capacitive switches.", IEEE Transactions on Device and Materials Reliability, Vol.6, No.4, December 2006, pp.556-563.
16. C.L. Goldsmith, et al. "High-cycle life testing of RF MEMS switches.", 2007 IEEE, pp1805-1808.