Investigation of dielectric degradation of microwave capacitive microswitches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 141-144

  Melle S ^a   Flourens, F ^a   Dubuc, D ^a,b   Grenier, K ^a   Pons, P ^a   Muraro, J L ^c   Segui, Y ^d   Plana, R ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

^c THALES ALENIA SPACE   (France)

^d Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRODEPOSITION; MICROWAVE DEVICES; PHOTORESISTS; SEMICONDUCTOR SWITCHES; THRESHOLD VOLTAGE;

DIELECTRIC CHARGING; DIELECTRIC DEGRADATION; MICROWAVE CAPACITIVE MICROSWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 3042826713     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. C.L.Goldsmith, Z.Yao, S.Eshelman, D.Denniston, "Performace of low-loss RF MEMS capacitive switches", IEEE Microwave and guided wave letters, pp.269-271, Aug.1998.
2. S.Pacheco, C.T.Nguyen, L.P.B.Katehi, "Micromechanical electrostatic K-band switches", IEEE MTT-S Digest, 1998.
3. C.Goldsmith, J.Ehmke, A.Malczewski, B.Pillans, S.Eshelman, Z.Yao, L.Brank, M.Eberly, "Lifetime characterization of capacitve RF MEMS switches", IEEE International Microwave Symposium, vol.1, May 2001.
4. I.DeWolf, W.M.Van Spengen, "Techniques to study the reliability of metal RF MEMS capacitive switches", Microelectronics Reliability , vol. 42, pp. 1789-1794, Nov.2002.
5. J.R.Reid, "Dielectric charging effects on capacitive MEMS actuators", workshop 2002 IEEE MTT-S.
6. K.Grenier et al., Bulk Silicon Micro-machined MEMS Switches for Millimeter-Wave Applications, EUMC 2001 - London, 24-28 th Sept.2001.
7. L. Rabbia, F. Flourens, P. Pons, K. Grenier, D. Dubuc, R. Plana, "Technological process of suspended millimeter wave switches" MEMSWAVE 2003, Toulouse, France.
8. W.M.Van Spengen, Robert Puers, Robert Mertens, I.DeWolf, "Experimental characterization of stiction due to charging in RF MEMS", IEDM, 2002.