Metal plasticity by grain rotation-Microdiffraction case studies

Materials Science and Engineering: A

Volumn 524, Issue 1-2, 2009, Pages 33-39

  Magid, K R ^a   Nyilas, R D ^a   Spolenak, R ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Deformation mechanism; Gold; Grain rotation; Microdiffraction

Indexed keywords

DEFORMATION; GOLD; ROTATION;

'CURRENT; CASE-STUDIES; DEFORMATION MECHANISM; DEVIATORIC PART; ELASTIC STRAIN TENSOR; GOLD; GRAIN ROTATION; METAL PLASTICITY; MICRODIFFRACTIONS; X-RAY LAUE MICRODIFFRACTION;

GRAIN GROWTH;

EID: 69249088035     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2009.05.004     Document Type: Article

References (43)

1. Courtney T.H. Mechanical Behavior of Materials (2000), McGraw-Hill, Singapore p. 331
2. Gruber P.A., Bohm J., Onuseit F., Wanner A., Spolenak R., and Arzt E. Size effects on yield strength and strain hardening for ultra thin Cu films with and without passivation: a study by synchrotron and bulge test techniques. Acta Materialia 56 (2008)
3. Lacour S.P., Wagner S., Huang Z.Y., and Suo Z. Stretchable gold conductors on elastomeric substrates. Applied Physics Letters 82 (2003) 2404
4. Lu N.S., Wang X., Suo Z.G., and Vlassak J. Metal films on polymer substrates stretched beyond 50%. Applied Physics Letters 91 (2007)
5. Lu L., Sui M.L., and Lu K. Superplastic extensibility of nanocrystalline copper at room temperature. Science 287 (2000) 1463
6. Larson B.C., Yang W., Ice G.E., Budai J.D., and Tischler J.Z. Three-dimensional X-ray structural microscopy with submicrometre resolution. Nature 415 (2002) 887
7. Tamura N., MacDowell A.A., Spolenak R., Valek B.C., Bravman J.C., Brown W.L., Celestre R.S., Padmore H.A., Batterman B.W., and Patel J.R. Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films. Journal of Synchrotron Radiation 10 (2003) 137
8. Tamura N., Celestre R.S., MacDowell A.A., Padmore H.A., Spolenak R., Valek B.C., Chang N.M., Manceau A., and Patel J.R. Submicron X-ray diffraction and its applications to problems in materials and environmental science. Review of Scientific Instruments 73 (2002) 1369
9. Maass R., Van Petegem S., Grolimund D., Van Swygenhoven H., Kiener D., and Dehm G. Crystal rotation in Cu single crystal micropillars: in situ Laue and electron backscatter diffraction. Applied Physics Letters 92 (2008) 071905
10. Harris K.E., Singh V.V., and King A.H. Grain rotation in thin films of gold. Acta Materialia 46 (1998) 2623
11. Li J.C.M. Possibility of subgrain rotation during recrystallization. Journal of Applied Physics 33 (1962) 2958
12. Ovid'ko I.A., and Sheinerman A.G. Special rotational deformation in nanocrystalline metals and ceramics. Scripta Materialia 59 (2008) 119
13. Romanov A.E. Mechanics and physics of disclinations in solids. European Journal of Mechanics A-Solids 22 (2003) 727
14. Romanov A.E., and Vladimirov V.I. Disclinations in crystalline solids. In: Nabarro F.R.N. (Ed). Dislocations in Solids vol. 9 (1992), North-Holland, Amsterdam 191
15. Tamura N., Padmore H.A., and Patel J.R. High spatial resolution stress measurements using synchrotron based scanning X-ray microdiffraction with white or monochromatic beam. Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing 399 (2005) 92
16. R.D. Nyilas, M. Kobas, R. Spolenak, Synchrotron X-ray microdiffraction reveals rotational plastic deformation mechanisms in polycrystalline thin films, Acta Materialia (2009), doi:10.1016/j.actamat.2009.04.024.
17. Phillips M.A., Spolenak R., Tamura N., Brown W.L., MacDowell A.A., Celestre R.S., Padmore H.A., Batterman B.W., Arzt E., and Patel J.R. X-ray microdiffraction: local stress distributions in polycrystalline and epitaxial thin films. Microelectronic Engineering 75 (2004) 117
18. Spolenak R., Brown W.L., Tamura N., MacDowell A.A., Celestre R.S., Padmore H.A., Valek B., Bravman J.C., Marieb T., Fujimoto H., Batterman B.W., and Patel J.R. Local plasticity of Al thin films as revealed by X-ray microdiffraction. Physical Review Letters 90 (2003)
19. Solenthaler C. On the organization and reorganization of intercrystalline boundaries as sources and sinks of dislocations. Physica Status Solidi A-Applied Research 149 (1995) 21
20. Solenthaler C. On fluctuating dislocation entities of grain boundaries as fields of ambiguity. Local Lattice Rotations and Disclinations in Microstructures of Distorted Crystalline Materials 87 (2002) 169
21. Balk T.J., Dehm G., and Arzt E. Parallel glide: unexpected dislocation motion parallel to the substrate in ultrathin copper films. Acta Materialia 51 (2003) 4471
22. Gao H., Zhang L., Nix W.D., Thompson C.V., and Arzt E. Crack-like grain-boundary diffusion wedges in thin metal films. Acta Materialia 47 (1999) 2865
23. Ericson F., Kristensen N., Schweitz J.A., and Smith U. A transmission electron-microscopy study of hillocks in thin aluminum films. Journal of Vacuum Science & Technology B 9 (1991) 58
24. Genin F.Y., and Siekhaus W.J. Experimental study to validate a model of hillock's formation in aluminum thin films. Journal of Applied Physics 79 (1996) 3560
25. Iwamura E., Ohnishi T., and Yoshikawa K. Influence of formation and decomposition of solid-solution on resistivity and hillock suppression in sputtered Al-Ta thin-films. Journal of the Japan Institute of Metals 59 (1995) 673
26. Kim D.K., Nix W.D., Vinci R.P., Deal M.D., and Plummer J.D. Study of the effect of grain boundary migration on hillock formation in Al thin films. Journal of Applied Physics 90 (2001) 781
27. Pennebaker W.B. hillock growth and stress relief in sputtered Au films. Journal of Applied Physics 40 (1969) 394
28. Chaudhari P. Hillock growth in thin-films. Journal of Applied Physics 45 (1974) 4339
29. Chang C.Y., and Vook R.W. Thermally induced hillock formation in Al-Cu films. Journal of Materials Research 4 (1989) 1172
30. Ronay M., and Aliotta C.F. Hillock formation in lead films by grain-boundary sliding. Philosophical Magazine A-Physics of Condensed Matter Structure Defects and Mechanical Properties 42 (1980) 161
31. Hwang S.J., Nix W.D., and Joo Y.C. A model for hillock growth in Al thin films controlled by plastic deformation. Acta Materialia 55 (2007) 5297
32. Kim D., Heiland B., Nix W.D., Arzt E., Deal M.D., and Plummer J.D. Microstructure of thermal hillocks on blanket Al thin films. Thin Solid Films 371 (2000) 278
33. Sauter L.X. Microstructural and Film Thickness Effects on the Thermomechanical Behavior of Thin Au Films (2006), Institut für Metallkunde, Universität Stuttgart, Stuttgart
34. Tamura N., MacDowell A.A., Celestre R.S., Padmore H.A., Valek B., Bravman J.C., Spolenak R., Brown W.L., Marieb T., Fujimoto H., Batterman B.W., and Patel J.R. High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron X-ray diffraction. Applied Physics Letters 80 (2002) 3724
35. Chung J.S., and Ice G.E. Automated indexing for texture and strain measurement with broad-bandpass X-ray microbeams. Journal of Applied Physics 86 (1999) 5249
36. Müller C., and Mornaghini F.C.F. Ordered arrays of faceted gold nanoparticles by dewetting and nanosphere lithography. Nanotechnology 19 (2008) 485306
37. Wei H.L., Zhang X.X., and Huang H.C. Spontaneous hillock growth on indium film surface. Chinese Physics Letters 23 (2006) 1880
38. Valek B.C., Bravman J.C., Tamura N., MacDowell A.A., Celestre R.S., Padmore H.A., Spolenak R., Brown W.L., Batterman B.W., and Patel J.R. Electromigration-induced plastic deformation in passivated metal lines. Applied Physics Letters 81 (2002) 4168
39. Valek B.C., Tamura N., Spolenak R., Caldwell W.A., MacDowell A.A., Celestre R.S., Padmore H.A., Braman J.C., Batterman B.W., Nix W.D., and Patel J.R. Early stage of plastic deformation in thin films undergoing electromigration. Journal of Applied Physics 94 (2003) 3757
40. Budiman A.S., Nix W.D., Tamura N., Valek B.C., Gadre K., Maiz J., Spolenak R., and Patel J.R. Crystal plasticity in Cu damascene interconnect lines undergoing electromigration as revealed by synchrotron X-ray microdiffraction. Applied Physics Letters 88 (2006)
41. Spolenak R., Kraft O., and Arzt E. Effects of alloying elements on electromigration. Microelectronics Reliability 38 (1998) 1015
42. Spolenak R., Tamura N., and Patel J. X-ray microdiffraction as a probe to reveal flux divergences in interconnects. AIP Conference Proceedings, vol. 817. Dresden, Germany (2006) 288
43. Olliges S., Gruber P., Bardill A., Ehrler D., Carstanjen H.D., and Spolenak R. Converting polycrystals into single crystals-selective grain growth by high-energy ion bombardment. Acta Materialia 54 (2006) 5393