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Volumn 81, Issue 22, 2002, Pages 4168-4170

Electromigration-induced plastic deformation in passivated metal lines

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMIGRATION; MICROSTRUCTURE; PASSIVATION; SHEAR STRESS; STRESS RELAXATION;

PASSIVATED METALS;

PLASTIC DEFORMATION;

EID: 0037175947 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1525880 Document Type: Article

Times cited : (91)

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