The nanogap Pirani - A pressure sensor with superior linearity in an atmospheric pressure range

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Khosraviani, Kourosh ^a   Leung, Albert M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE AREA; FABRICATION TECHNIQUE; FULL SCALE; GAP SIZE; GAS PHASE ETCHING; HEATER TEMPERATURES; HEATSINKS; MEASUREMENT RANGE; MECHANICAL ROBUSTNESS; MICRO-BRIDGE; MICROMACHINED; NANO-GAP; NARROW GAP; NON-LINEARITY; PRESSURE RANGES; SACRIFICIAL LAYER; TRANSITION PRESSURE; WET-ETCHING PROCESS; XENON DIFLUORIDE;

AMORPHOUS SILICON; ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; GAS DYNAMICS; GASES; LINEARIZATION; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SUBSTRATES; XENON;

WET ETCHING;

EID: 68849125764     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045007     Document Type: Article

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