Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

Journal of Materials Science Letters

Volumn 19, Issue 24, 2000, Pages 2243-2245

  Qin, Ming ^a   Poon, Vincent M C ^b  

^a SOUTHEAST UNIVERSITY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELASTIC MODULI; ELASTICITY; ETCHING; EVAPORATION; NICKEL ALLOYS; RAPID THERMAL ANNEALING; SILICON NITRIDE; SILICON WAFERS; SINGLE CRYSTALS; SULFURIC ACID; THIN FILMS;

NICKEL SILICIDE;

METALLIC FILMS;

EID: 0034427924     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006729009092     Document Type: Article

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