A doubly anchored surface micromachined pirani gauge for vacuum package characterization

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 506-509

  Stark, Brian H ^a   Mei, Yuhai ^a   Zhang, Chunbo ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPUTER SOFTWARE; DESIGN; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS PACKAGING; MICROMACHINING; PRESSURE MEASUREMENT; SURFACES; VACUUM GAGES;

INTERFACE ELECTRONICS; LEAK RATES; LEAK TESTING; PIRANI GAUGE; SOFTWARE CALIBRATION TECHNIQUE; VACUUM PACKAGING TECHNOLOGIES;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155575     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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