Fabrication and study of a shallow-gap Pirani vacuum sensor with a linearly measurable atmospheric pressure range

Sensors and Materials

Volumn 11, Issue 6, 1999, Pages 383-392

  Chou, Bruce C S ^a   Chen, Chung Nan ^b   Shie, Jin Shown ^b  

^a INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Freeze drying; Packaging; Pirani vacuum sensor; Sacrificial layer; TMAH

Indexed keywords

EID: 0033236825     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. M. Pirani: Verh. Dtsch. Phys. Ges. 8 (1906) 686.
2. P. E. Seiden: Rev. Sci. Instrum. 28 (1957) 657.
3. A. W. Van Herwaarden and P. M. Sarro: Sensors and Actuators 8 (1985) 187.
4. C. H. Mastrangelo and R. S. Muller: IEEE J. Solid-State Circuits 26 (1991) 1998.
5. A. M. Robinson, P. Haswell, R. P. Lawson and M. Parameswaran: Rev. Sci. Instrum. 63 (1992) 2026.
6. P. K. Weng and J. S. Shie: Rev. Sci. Instrum. 65 (1994) 492.
7. J. S. Shie, B. C. S. Chou, and Y. M. Chen: J. Vac. Sci. Technol. A 13 (1995) 2972.
8. H. Baltes and O. Paul: Sensors and Materials 8 (1996) 409.
9. B. C. S. Chou and J. S. Shie: Transduces'97 Technical Digest 1997 (Chicago, 1997) 1465.
10. B. C. S. Chou: Ph. D. dissertation (1997) NCTU, Taiwan, ROC.
11. M. Von Smoluchowski: Ann. Physik 35 (1911) 983.
12. R. T. Howe: J. Vac. Sci. Technol. B 6 (1988) 1809.
13. B. C. S. Chou, J. S. Shie and C. N. Chen: IEEE Electron Device Lett. 18 (1997) 599.
14. T. Inoue and H. Osatake: Arch. Histol. Cytol. 51 (1988) 53.