The nanogap Pirani - A pressure sensor with superior linearity in atmospheric pressure range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 900-903

  Khosraviani, Kourosh ^a   Leung, Albert M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; COMPOSITE MICROMECHANICS; GALLIUM ALLOYS; LINEARIZATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METEOROLOGY; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; REACTIVE ION ETCHING; SENSORS; THERMOELECTRICITY;

ABSOLUTE PRESSURES; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; NANO GAPS; NARROW GAPS; NON LINEARITIES; PRESSURE RANGES; TEMPERATURE VARIATIONS; TRANSITION PRESSURES;

HIGH TEMPERATURE TESTING;

EID: 50149117228     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443802     Document Type: Conference Paper

References (11)

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