An improved performance poly-Si Pirani vacuum gauge using heat-distributing structural supports

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 93-102

  Mitchell, Jay ^a   Lahiji, G Roientan ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Measurement; Packaging; Vacuum measurement

Indexed keywords

CMOS INTEGRATED CIRCUITS; POLYSILICON; PRESSURE MEASUREMENT; RIGIDITY; SUPPORTS; THERMOELECTRICITY;

CONSTANT TEMPERATURE CIRCUITRY; HEAT DISTRIBUTION; MICRO-PIRANI VACUUM GAUGE;

VACUUM GAGES;

EID: 40449141425     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.912711     Document Type: Article

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