Pirani pressure sensor with distributed temperature measurement

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 718-722

  De Jong, B R ^a   Bula, W P ^a   Zalewski, D ^a   Van Baar, J J ^a   Wiegerink, R J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Distributed sensing; Pirani sensors; Pressure sensors; Thermal sensors

Indexed keywords

DEPOSITION; HEAT CONDUCTION; HEAT RESISTANCE; MATHEMATICAL MODELS; POLYSILICON; PRESSURE GAGES; PRESSURE MEASUREMENT; RESISTORS; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY;

DISTRIBUTED SENSING; PIRANI SENSORS; PRESSURE SENSORS; THERMAL SENSORS;

SENSORS;

EID: 1542333625     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. J.J. van Baar, R.J. Wiegerink, T.S.J. Lammerink, J.W. Berenschot, G.J.M. Krijnen, M.C. Elwenspoek, "Combined Pirani/bending membrane pressure sensor", MEMS, Las Vegas, January 20-24, 2002.
2. J.J. van Baar, R.J. Wiegerink, J.W. Berenschot, T.S.J. Lammerink, G.J.M. Krijnen, M.C. Elwenspoek, "Pressure sensor based on distributed temperature sensing", IEEE Sensors'02, Orlando, June 11-14, 2002.
3. U. Bonne, and D. Kubisiak, "Burstproof, thermal pressure sensor for gases," Solid State Sensor and Actuator Workshop, Hilton Head, South Carolina, June 13-16,1994, pp. 78-81.
4. J.J. van Baar, "Distributed Thermal Micro Sensors for Fluid Flow", PhD-thesis, University of Twente, 2002, pp. 41-44.
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6. B.R. de Jong, "Fabrication, modeling and characterization of test devices for a high frequency power sensor", MSc-thesis, University of Twente, 2002.