MEMS mechanical fatigue: Experimental results on gold microbeams

Journal of Microelectromechanical Systems

Volumn 18, Issue 4, 2009, Pages 828-835

  Somà, Aurelio ^a   De Pasquale, Giorgio ^a  

^a POLITECNICO DI TORINO   (Italy)

Author keywords

Failure analysis; Fatigue; Microelectromechanical (MEM) devices

Indexed keywords

FATIGUE; FATIGUE DEVICE; FATIGUE LIMIT; FINITE-ELEMENT METHOD; MATERIAL DEGRADATION; MATERIAL STRENGTH; MECHANICAL FATIGUE; MICRO BEAMS; MICROELECTROMECHANICAL (MEM) DEVICES; NEW STRATEGY; PULL-IN VOLTAGE; SCANNING ELECTRON MICROSCOPE; STRESS DISTRIBUTION; TEST DEVICE; UPPER SURFACE;

DEGRADATION; ELECTRIC POTENTIAL; ELECTRONIC EQUIPMENT TESTING; ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; QUALITY ASSURANCE; SAFETY FACTOR; SCANNING ELECTRON MICROSCOPY; STRESS CONCENTRATION; SURFACE TOPOGRAPHY;

FAILURE ANALYSIS;

EID: 68849124727     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2024796     Document Type: Article

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