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Volumn 44, Issue 2, 2005, Pages 155-162

Dynamic identification of MEMS by eigensensitivity and newmark simulation

Author keywords

Dynamic analysis; Electromechanical microsystems; Numerical simulation; Object oriented programming

Indexed keywords

ALGORITHMS; C (PROGRAMMING LANGUAGE); COMPUTER SIMULATION; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC FIELD EFFECTS; ELECTROMECHANICAL DEVICES; OBJECT ORIENTED PROGRAMMING; RESONANCE; TRANSDUCERS;

EID: 22144463874     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10470-005-2595-9     Document Type: Conference Paper
Times cited : (8)

References (16)
  • 3
    • 0033705043 scopus 로고    scopus 로고
    • Computer-aided generation of nonlinear reduced-order dynamic macromodels - I: Non-stress-stiffened case
    • L.D. Gabbay, J.E. Mehner, and S. Senturia, "Computer-aided generation of nonlinear reduced-order dynamic macromodels - I: Non-stress-stiffened case." Journal of Microelectromechanical Systems, vol. 9, no. 2, pp. 262-269, 2001.
    • (2001) Journal of Microelectromechanical Systems , vol.9 , Issue.2 , pp. 262-269
    • Gabbay, L.D.1    Mehner, J.E.2    Senturia, S.3
  • 5
    • 0032640070 scopus 로고    scopus 로고
    • Accurate fully-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces
    • Orlando
    • Y. He, J. Marchetti, C. Gallegos, and F. Maseeh, "Accurate fully-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces," in Proc. of the IEEE Int. MEMS'99 Conference, Orlando, 1999.
    • (1999) Proc. of the IEEE Int. MEMS'99 Conference
    • He, Y.1    Marchetti, J.2    Gallegos, C.3    Maseeh, F.4
  • 12
    • 22144490202 scopus 로고    scopus 로고
    • ANSYS documenation, version 7.0
    • ANSYS Inc. Corporate
    • ANSYS Documenation, version 7.0, Coupled-Field Analysis Guide, ANSYS Inc. Corporate, 2002.
    • (2002) Coupled-field Analysis Guide
  • 15
    • 1642616579 scopus 로고    scopus 로고
    • Analytical modeling of beam behavior under different actuations: Profile and stress expressions
    • I. Dufour and H. Sarraute, "Analytical modeling of beam behavior under different actuations: Profile and stress expressions." Journal of Modeling and Simulation of Microsystems, vol. 1, no. 1, pp. 57-64, 1999.
    • (1999) Journal of Modeling and Simulation of Microsystems , vol.1 , Issue.1 , pp. 57-64
    • Dufour, I.1    Sarraute, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.