Shell-type micromechanical oscillator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 229-236

  Zalalutdinov, Maxim ^a   Aubin, Keith ^a   Michael, Christopher ^b   Reichenbach, Robert B ^a   Alan, Tuncay ^a   Zehnder, Alan ^a   Houston, Brian ^c   Parpia, Jeevak ^a   Craighead, Harold ^a  

^a Department of Population Medicine and Diagnostic Sciences   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Frequency stability; Positive feedback; Resonator; Self sustained oscillations; Shell; Thermal drive

Indexed keywords

CAVITY RESONATORS; FEEDBACK; FREQUENCY STABILITY; HELIUM NEON LASERS; LASER BEAMS; OSCILLATIONS; POLYSILICON; STRESSES; THIN FILMS;

MICROMECHANICAL OSCILLATOR; SELF-SUSTAINED OSCILLATION; THERMAL DRIVE; THERMOMECHANICAL STRESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0042830690     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499107     Document Type: Conference Paper

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