Shell-type micromechanical actuator and resonator

Applied Physics Letters

Volumn 83, Issue 18, 2003, Pages 3815-3817

  Zalalutdinov, Maxim ^a,b   Aubin, Keith L ^a,b   Reichenbach, Robert B ^a,b   Zehnder, Alan T ^a,b   Houston, Brian ^a,b   Parpia, Jeevak M ^a,b   Craighead, Harold G ^a,b  

^a Department of Obstetrics Gynecology   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; COMPUTER SIMULATION; ELECTRON DEVICE MANUFACTURE; FINITE ELEMENT METHOD; LASER BEAMS; MAGNETOSTRICTION; NATURAL FREQUENCIES; POLYSILICON; SIGNAL PROCESSING; STRESSES; THERMOELASTICITY; THIN FILMS;

DOME SHAPED RADIO FREQUENCY MICROMECHANICAL RESONATORS; PHOTOINDUCED STRESS; PRESTRESSED THIN POLYSILICON FILM; SHAPE MEMORY MECHANISM; SHELL TYPE MICROMECHANICAL ACTUATOR; THERMOMECHANICAL STRESS;

MICROACTUATORS;

EID: 0345359873     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1622792     Document Type: Article

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