Third-order intermodulation in a micromechanical thermal mixer

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1244-1252

  Reichenbach, Robert B ^a   Zalalutdinov, Maxim ^a   Aubin, Keith L ^a   Rand, Richard ^a   Houston, Brian H ^b   Parpia, Jeevak M ^a   Craighead, Harold G ^a  

^a Department of Population Medicine and Diagnostic Sciences   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Bandpass filter; Duffing oscillator; Intermediate frequency; Microelectromechanical systems (MEMS); Mixer; Non linear oscillations; Radio frequency (RF); Thermal mechanical coupling; Third order intermodulation distortion (IM3)

Indexed keywords

BANDPASS FILTERS; FINITE ELEMENT METHOD; INTERMODULATION; MATHEMATICAL MODELS; MICROACTUATORS; MIXER CIRCUITS; OSCILLATORS (ELECTRONIC); RESONATORS; SIGNAL DISTORTION;

DUFFING OSCILLATOR; INTERMEDIATE FREQUENCY; NONLINEAR OSCILLATIONS; THIRD ORDER INTERMODULATION DISTORTION;

MICROELECTROMECHANICAL DEVICES;

EID: 29244484445     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859080     Document Type: Article

References (21)

1. C. T.-C. Nguyen, "Micromechanical devices for wireless communications (invited plenary)," in Proc. 1998 IEEE International Work Shop on Micro Electro Mechanical Systems, Heidelberg, Germany, Jan. 25-29, 1998, pp. 1-7.
2. J. Wang, Z. Ren, and C. T.-C. Nguyen, "Self-aligned 1.14-GHz vibrating radial-mode disk resonators," in Proc. Dig. Tech. Papers the 12th Int. Conf. on Solid-State Sensors & Actuators (Transducers'03), Boston, Massachusetts, Jun. 8-12, 2003, pp. 947-950.
3. R. B. Reichenbach, M. Zalalutdinov, K. L. Aubin, D. A. Czaplewski, B. Ilic, B. H. Houston, H. G. Craighead, and J. M. Parpia, "Resistively actuated micromechanical dome resonators," in Proc. SPIE MEMS/MOEMS Components and Their Applications, San Jose, CA, Jan. 26-27, 2004, pp. 26-27.
4. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamaki, and H. Seppa, "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," IEEE Electron Device Lett., vol. 25, no. 4, pp. 173-175, Apr. 2004.
5. M. Zalalutdinov, A. Zehnder, A. Olkhovets, S. Turner, L. Sekaric, B. Ilic, D. Czaplewski, J. M. Parpia, and H. G. Craighead, "Autoparametric optical drive for micromechanical oscillators," Appl. Phys. Lett., vol. 79, p. 695, 2001.
6. M. Zalalutdinov, K. L. Aubin, R. B. Reichenbach, A. T. Zehnder, B. Houston, J. M. Parpia, and H. G. Craighead, "Shell-type micromechanical actuator and resonator," Appl. Phys. Lett., vol. 83, pp. 3815-3817, 2003.
7. B. Razavi, RF Microelectronics. Upper Saddle River, NJ: Prentice Hall, 1998.
8. A.-C. Wong and C.T.-C. Nguyen, "Micromechanical mixer+filters ("mixlers")," J. Microelectromech. Syst., vol. 13, no. 1, pp. 100-112, Feb. 2004.
9. O. K. Jensen, T. E. Kolding, C. R. Iversen, S. Laursen, R. Reynisson, J. H. Mikkelsen, E. Pedersen, M. B. Jenner, and T. Larsen, "RF receiver requirements for 3G W-CDMA mobile equipment," Microw. J., vol. 43, no. 2, pp. 22-46, 2000.
10. S. Evoy, D. W. Carr, L. Sekaric, A. Olkhovets, J. M. Parpia, and H. G. Craighead, "Nanofabrication and electrostatic operation of single crystal silicon paddle oscillators," J. Appl. Phys., vol. 86, p. 6072, 1999.
11. T. Mattila, O. Jaakkola, J. Kiihamaki, J. Karttunen, T. Lamminmaki, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "14 MHz micromechanical oscillator," Sens. Actuators A, Phys., vol. A97-98, pp. 497-502, Apr. 1, 2002.
12. M. Zalalutdinov, K. L. Aubin, C. Michael, R. B. Reichenbach, T. Alan, A. T. Zehnder, B. H. Houston, J. M. Parpia, and H. G. Craighead, "Shell-type micromechanical oscillator," in Proc. SPIE, vol. 5116, 2003, pp. 229-236.
13. B. Ilic, S. Krylov, K. Aubin, R. B. Reichenbach, and H. G. Craighead, "Optical excitation of nanoelectromechanical oscillators," Appl. Phys. Lett., vol. 86, p. 193-114, 2005.
14. D. W. Carr, L. Sekaric, and H. G. Craighead, "Measurement of nanomechanical resonant structures in single-crystal silicon," J. Vac. Sci. Technol B., vol. 16, pp. 3821-3824, Nov./Dec. 1998.
15. J. Cao and C. T.-C. Nguyen, "Drive amplitude dependence of micromechanical resonator series motional resistance," in Proc. Dig. Tech. Papers 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1826-1829.
16. R. H. Rand. (2004) Lecture Notes on Nonlinear Vibrations [Online]. Available: http://dspace.library.cornell.edu/handle/1813/79
17. L. Aubin, M. Zalalutdinov, T. Alan, R. B. Reichenbach, R. Rand, A. Zehnder, J. Parpia, and H. Craighead, "Limit cycle oscillations in CW laserℝiven NEMS," J. Microelectromech. Syst., vol. 13, no. 6, pp. 1018-1026, Dec. 2004.
18. R. Navid, J. R. Clark, M. Demirci, and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators," in Proc. Tech. Dig. 14th Int. IEEE Micro Electro Mechanical Systems Conference, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 228-231.
19. S. A. Bhave and R. T. Howe, "Internal electrostatic transduction for bulk-mode MEMS resonators," in Dig. of Tech. Papers the 12th Int. Conf. on Solid-State Sensors & Actuators (Transducers'03), Boston, Massachusetts, June 8-12, 2003, pp. 947-950.
20. V. Kaajakari, T. Mattila, A. Oja, and H. Seppá, "Nonlinear limits for single-crystal silicon microresonators," J. Microelectromech. Syst, vol. 13, no. 5, pp. 715-724, Oct. 2004.
21. W. N. Sharpe Jr, B. Yuan, R. Vaidyanathan, and R. L. Edwards, "Measurements of young's modulus, poisson's ratio, and tensile strength of polysilicon," in Proc. Tenth Annual International Workshop on Micro Electro Mechanical Systems, Jan. 26-30, 1997, pp. 424-429.