Fabrication, self-assembly, and properties of ultrathin AlN/GaN porous crystalline nanomembranes: Tubes, spirals, and curved sheets

ACS Nano

Volumn 3, Issue 7, 2009, Pages 1663-1668

  Mei, Yongfeng ^a   Thurmer, Dominic J ^a   Deneke, Christoph ^a   Kiravittaya, Suwit ^a   Chen, Yuan Fu ^a   Dadgar, Armin ^b   Bertram, Frank ^b   Bastek, Barbara ^b   Krost, Alois ^b   Christen, Jürgen ^b   Reindl, Thomas ^c   Stoffel, Mathieu ^a,c   Coric, Emica ^a   Schmidt, Oliver G ^a  

^a IFW DRESDEN   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

^c MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

AlN; GaN; Nanomembrane; Nanotube; Porous; Rolled up

Indexed keywords

ALN; GAN; NANOMEMBRANE; POROUS; ROLLED-UP;

CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; ELECTRON IRRADIATION; GALLIUM ALLOYS; GALLIUM NITRIDE; NANOPORES; NANOTUBES; SEMICONDUCTING GALLIUM; SILICON;

POROUS SILICON;

EID: 68649103314     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn900580j     Document Type: Article

References (43)

1. Ahn, J. H.; Kim, H. S.; Lee, K. J.; Jeon, S.; Kang, S. J.; Sun, Y. G.; Nuzzo, R. G.; Rogers, J. A. Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials. Science 2006, 314, 1754-1757
2. Lee, K. J.; Meitl, M. A.; Ahn, J.-H.; Rogers, J. A.; Nuzzo, R. G. Bendable GaN High Electron Mobility Transistors on Plastic Substrates. J. Appl. Phys. 2006, 100, 124507.
3. Choi, Y.-S.; Hennessy, K.; Sharma, R.; Haberer, E.; Gao, Y.; DenBaars, S. P.; Meier, C. GaN Blue Photonic Crystal Membrane Nanocavities. Appl. Phys. Lett. 2005, 87, 243101.
4. Tamboli, A. C.; Haberer, E. D.; Sharama, R.; Lee, K. H.; Nakamura, S.; Hu, E. L. Room-Temperature Continuous-Wave Lasing in GaN/InGaN Microdisks. Nat. Photonics 2007, 1, 61-64.
5. Zimmermann, T; Neuburger, M.; Benkart, P.; Hernández- Guillén, F. J.; Pietzka, C.; Kunze, M.; Daumiller, I.; Dadgar, A.; Krost, A.; Kohn, E. Piezoelectric GaN Sensor Structures. IEEE Electron Device Lett. 2006, 27, 309-312.
6. Cleland, A. N.; Pophristic, M.; Ferguson, I. Single-Crystal Aluminum Nitride Nanomechanical Resonators. Appl. Phys. Lett. 2001, 79, 2070. (Pubitemid 32944994)
7. Foerster, Ch.; Cimalla, V.; Brueckner, K.; Lebedev, V.; Stephan, R.; Hein, M.; Ambacher, O. Processing of Novel SiC and Group III-Nitride Based Micro-and Nanomechanical Devices. Phys. Status Solidi 2005, 202, 671-676.
8. Yang, Z.; Wang, R. N.; Jia, S.; Wang, D.; Zhang, B. S.; Lau, K. M.; Chen, K. J. Mechanical Characterization of Suspended GaN Microstructures Fabricated by GaN-on-Patterned-Silicon Technique. Appl, Phys. Lett. 2006, 88, 041913.
9. Brueckner, K.; Niebelschuetz, F.; Tonisch, K.; Michael, S.; Dadgar, A.; Krost, A.; Cimalla, V.; Ambacher, O.; Stephan, R.; Hein, M. A. Two-Dimensional Electron Gas Based Actuation of Piezoelectric AlGaN/GaN Microelectromechanical Resonators. Appl. Phys. Lett. 2008, 93, 173504.
10. Stutzmann, M.; Garrido, J. A.; Eickhoff, M.; Brandt, M. S. Direct Biofunctionalization of Semiconductors: A Survey. Phys. Status Solidi A 2006, 203, 3424-3437.
11. Schmidt, O. G.; Eberl, K. Nanotechnology: Thin Solid Films Roll Up into Nanotubes. Nature 2001, 410, 168.
12. Prinz, V. Ya.; Seleznev, V. A.; Gutakovsky, A. K.; Chehovskiy, A. V.; Preobrazhenskii, V. V.; Putyato, M. A.; Gavrilova, T. A. Free-Standing and Overgrown InGaAs/GaAs Nanotubes, Nanohelices and Their Arrays. Phys. E 2000, 6, 828-831.
13. Mei, Y. F.; Huang, G. S.; Solovev, A. A.; Bermúdez Ureña, E.; Mönch, J. I.; Ding, F.; Reindl, T.; Fu, R. K. Y.; Chu, P. K.; Schmidt, O. G. Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers. Adv. Mater. 2008, 20, 4085-4090.
14. Bell, D. J.; Dong, L. X.; Nelson, B. J.; Golling, M.; Zhang, L.; Grützmacher, D. Fabrication and Characterization of Three-Dimensional InGaAs/GaAs Nanosprings. Nano Lett. 2006, 6, 725-729.
15. In, H. J.; Kumar, S.; Shao-Horn, Y.; Barbastathis, G. Origami Fabrication of Nanostructured, Three-Dimensional Devices: Electrochemical Capacitors with Carbon Electrodes. Appl. Phys. Lett. 2006, 88, 083104.
16. Meyer, G. J.; Dias, N. L.; Blick, R. H.; Knezevic, I. Magnetotransport in Nonplanar SiGe/Si Nanomembranes. IEEE Trans. Nanotechnol. 2007, 6, 446-450.
17. Mei, Y. F.; Thurmer, D. J.; Cavallo, F.; Kiravittaya, S.; Schmidt, O. G. Semiconductor Sub-micro-/nanochannel Networks by Deterministic Layer Wrinkling. Adv. Mater. 2007, 19, 2124-2128.
18. Thurmer, D. J.; Deneke, Ch.; Mei, Y. F.; Schmidt, O. G. Process Integration of Microtubes for Fluidic Applications. Appl. Phys. Lett. 2006, 89, 223507.
19. Kipp, T.; Welsch, H.; Strelow, Ch.; Heyn, Ch.; Heitmann, D. Optical Modes in Semiconductor Microtube Ring Resonators. Phys. Rev. Lett. 2006, 96, 077403.
20. Stonas, A. R.; MacDonald, N. C.; Turner, K. L.; Denbaars, S. P.; Hu, E. L. Photoelectrochemical Undercut Etching for Fabrication of GaN Microelectromechanical Systems. J. Vac. Sci. Technol., B 2001, 19, 2838-2841.
21. 2(100) for Nanoelectromechanical Systems. Appl. Phys. Lett. 2004, 84, 4756.
22. Zaus, E.; Hermann, M.; Stutzmann, M.; Eickhoff, M. Fabrication of Freestanding GaN Microstructures Using AlN Sacrificial Layers. Phys. Status Solidi PRL 2007, 1, R10-R12.
23. Strittmatter, R. P.; Beach, R. A.; McGill, T. C. Fabrication of GaN Suspended Microstructures. Appl. Phys. Lett. 2001, 78, 3226.
24. Striemer, C. C.; Gaborski, T. R.; McGrath, J. L.; Fauchet, P. M. Charge-and Size-based Separation of Macromolecules using Ultrathin Silicon Membranes. Nature 2007, 445, 749-753.
25. Wang, G. J.; Chen, C. L.; Hsu, S. H.; Chiang, Y. L. Bio-MEMS fabricated artificial capillaries for Tissue Engineering. Microsyst. Technol. 2005, 12, 120-127.
26. Kros, A.; Dadgar, A. GaN-based Optoelectronics on Silicon Substrates. Mater. Sci. Eng., B 2002, 93, 77-84.
27. Huang, M.; Boone, C.; Roberts, M.; Savage, D. E.; Lagally, M. G.; Shaji, N.; Qin, H.; Blick, R.; Nairn, J. A.; Liu, F. Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication. Adv. Mater. 2005, 17, 2860-2864.
28. Liu, R.; Ponce, F. A.; Dadgar, A.; Krost, A. Atomic Arrangement at the AlN/Si(111) Interface. Appl. Phys. Lett. 2003, 83, 860.
29. Ott, H. Das Gitter des Aluminiumnitrids (AlN). Z. Phys. 1924, 22, 201.
30. Krost, A.; Dadgar, A.; Blasing, J.; Diez, A.; Hempel, T.; Petzold, S.; Christen, J.; Clos, R. Evolution of Stress in GaN Heteroepitaxy on AlN/Si(111): From Hydrostatic Compressive to Biaxial Tensile. Appl. Phys. Lett. 2004, 85, 3441.
31. Schmidt, O. G.; Schmarje, N.; Deneke, C.; Muller, C.; Jin-Phillipp, N. Y. Three-Dimensional Nano-objects Evolving from a Two-Dimensional Layer Technology. Adv. Mater. 2001, 13, 756-759.
32. Malachias, A.; Mei, Y. F.; Annabattula, R. K.; Deneke, C.; Onck, P. R.; Schmidt, O. G. Wrinkled-up Nanochannel Networks: Long-Range Ordering, Scalability, and X-ray Investigation. ACS Nano 2008, 2, 1715-1721.
33. Deneke, C.; Müller, C.; Jin-Phillipp, N. Y.; Schmidt, O. G. Diameter Scalability of Rolled-up In(Ga)As/GaAs Nanotubes. Semicond. Sci. Technol. 2002, 17, 1278-1281.
34. Songmuang, R.; Deneke, Ch.; Schmidt, O. G. Rolled-up Micro-and Nanotubes from Single-Material Thin Films. Appl. Phys. Lett. 2006, 89, 223109.
35. Hoffmann, R. W. The Mechanical Properties of Thin Condensed Films. Phys. Thin Films 1966, 3, 211.
36. Considered AlN/GaN film is assumed to have symmetric shape with 20 nm thick and isotopic elastic constants (Young modulus =150 GPa, ν =0.22).
37. Chou, P. C.; Pagano, N. J. Elasticity: Tensor, Dyadic, and Engineering Approaches; Dover: New York, 1967.
38. Grundmann, M. Nanoscroll Formation from Strained Layer Heterostructures. Appl. Phys. Lett. 2003, 83, 2444.
39. Mei, Y. F.; Siu, G. G.; Fu, R. K. Y.; Chu, P. K.; Li, Z. M.; Zhai, J. P.; Liu, H. J.; Tang, Z. K.; Lai, C. W.; Ong, H. C. Visible Cathodoluminescence of 4 Å Single-Walled Carbon Nanotubes. Appl. Phys. Lett. 2005, 87, 213114.
40. Hui, K. C.; An, H. J.; Zhang, X. Y.; Xu, J. B.; Dai, J. Y.; Ong, H. C. Electron Beam Induced Light Emission and Charge Conduction Patterning in ZnO by Using an AlOx Layer. Adv. Mater. 2005, 17, 1960-1964.
41. Xie, R.; Sekiguchi, T.; Ishigaki, T.; Ohashi, N.; Li, D.; Yang, D.; Liu, B.; Bando, Y. Enhancement and Patterning of Ultraviolet Emission in ZnO with an Electron Beam. Appl. Phys. Lett. 2006, 88, 134103.
42. Kang, J.; Ogawa, T. Yellow Luminescence from Precipitates in GaN Epilayers. Appl. Phys. A: Mater. Sci. Process. 1999, 69, 631-635.
43. 4/Ar. Appl. Phys. Lett. 1996, 68, 367.