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Volumn 85, Issue 16, 2004, Pages 3441-3443

Evolution of stress in GaN heteroepitaxy on AIN/Si(111): From hydrostatic compressive to biaxial tensile

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; INTERDIFFUSION (SOLIDS); METALLORGANIC VAPOR PHASE EPITAXY; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY; SILICON; TENSILE STRESS; X RAY DIFFRACTION ANALYSIS;

EID: 9744235815     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1808237     Document Type: Article
Times cited : (40)

References (22)
  • 21
    • 0142159473 scopus 로고    scopus 로고
    • Cambridge University Press, Cambridge, UK
    • L. B. Freund and S. Suresh, Thin Film Materials (Cambridge University Press, Cambridge, UK, 2003), p. 69.
    • (2003) Thin Film Materials , pp. 69
    • Freund, L.B.1    Suresh, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.