Three-dimensional nano-objects evolving from a two-dimensional layer technology

Advanced Materials

Volumn 13, Issue 10, 2001, Pages 756-759

  Schmidt, O G ^a   Schmarje, N ^a   Deneke, C ^a   Muandller, C ^a   Jin Phillipp, N Y ^a  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LITHOGRAPHY; MOLECULAR BEAM EPITAXY; MULTILAYERS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS; TWO DIMENSIONAL;

NANOELECTROCHEMICAL OBJECTS; NENOMECHANIC OBJECTS; THIN SOLID FILMS;

NANOTUBES;

EID: 0035902003     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200105)13:10<756::AID-ADMA756>3.0.CO;2-F     Document Type: Article

References (5)