Self-consistent modeling of the effect of wall-neutral reactions on parallel plate radio frequency discharge plasma in pure hydrogen

IEEE Transactions on Plasma Science

Volumn 35, Issue 5 I, 2007, Pages 1241-1246

  Diomede, Paola ^a   Hassouni, Khaled ^b   Longo, Savino ^a,c   Capitelli, Mario ^a,c  

^a UNIVERSITY OF BARI   (Italy)

^b UNIVERSITÉ PARIS 13   (France)

^c CNR   (Italy)

Author keywords

Monte Carlo collisions; Particle in cell simulation; Surface catalysis; Vibrational kinetics

Indexed keywords

CHARGED PARTICLES; KINETIC ENERGY; MONTE CARLO METHODS; VIBRATIONS (MECHANICAL);

MONTE CARLO COLLISIONS; PARTICLE-IN-CELL SIMULATION; SURFACE CATALYSIS; VIBRATIONAL KINETICS;

PLASMA DEVICES;

EID: 35348815014     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.901899     Document Type: Article

References (9)

1. M. Capitelli, R. Celiberto, and M. Cacciatore, "Needs for cross-sections in plasma chemistry," in Advances in Atomic, Molecular and Optical Physics, vol. 33, M. Inokuti, Ed. New York: Academic, 1994, pp. 321-372.
2. B. Kalache, T. Novikova, A. Fontcuberta i Morral, P. Roca i Cabarrocas, W. Morscheidt, and K. Hassouni, "Investigation of the coupling between chemistry and discharge dynamics in radio frequency hydrogen plasmas in the Torr regime," J. Phys. D, Appl. Phys., vol. 37, no. 13, pp. 1765-1773, Jul. 2004.
3. A. Salabas, L. Marques, J. Jolly, G. Gousset, and L. L. Alves, "Systematic characterization of low-pressure capacitively coupled hydrogen discharges," J. Appl. Phys., vol. 95, no. 9, pp. 4605-4620, May 2004.
4. L. Marques, J. Jolly, G. Gousset, and L. L. Alves, "Capacitively coupled hydrogen discharges: Modeling vs. experiment," High Temp. Mater. Process., vol. 8, no. 4, pp. 499-518, 2004.
5. P. Diomede, S. Longo, and M. Capitelli, "Effect of discharge voltage on capacitively coupled, parallel plate RF hydrogen plasmas," Plasma Sources Sci. Technol., vol. 14, no. 3, pp. 459-466, Aug. 2005.
6. 2 plasmas," Eur Phys. J. D., vol. 33, no. 4, pp. 243-251, 2005.
7. C. K. Birdsall, "Particle-in-cell charged particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC," IEEE Trans. Plasma Sci., vol. 19, no. 2, pp. 65-85, Apr. 1991.
8. S. Longo and P. Diomede, "Monte Carlo modeling of gas phase ion transport under thermal gradients and external fields," Eur. Phys. J. Appl. Phys., vol. 26, no. 3, pp. 177-185, Jun. 2004.
9. E. Molinari and M. Tomellini, "Non-equilibrium vibrational kinetics and 'hot atom' models in the recombination of hydrogen atoms on surfaces," Chem. Phys., vol. 270, no. 3, pp. 439-458, Aug. 2001.