Velocity distribution of H- ions in low temperature hydrogen plasma

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 2, 2008, Pages 1600-1606

  Diomede, Paola ^a   Longo, Savino ^a,b  

^a UNIVERSITY OF BARI   (Italy)

^b CNR   (Italy)

Author keywords

Ion transport; Monte Carlo (MC) methods; Negative ions; Spherical harmonics expansion

Indexed keywords

ION SOURCES; MOSFET DEVICES; VELOCITY CONTROL;

ION TRANSPORT; MONTE CARLO (MC) METHODS; NEGATIVE IONS; SPHERICAL HARMONICS EXPANSION;

BOLTZMANN EQUATION;

EID: 50649086335     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.927273     Document Type: Article

References (19)

1. 2 plasmas for negative ion production: Modelling aspects," Nucl. Fusion, vol. 46, no. 6, pp. S260-S274, Jun. 2006.
2. M. Bacal, "Physics aspects of negative ion sources," Nucl. Fusion vol. 46, no. 6, pp. S250-S259, Jun. 2006.
3. B. M. Penetrante, J. N. Bardsley, and L. C. Pitchford, "Monte Carlo and Boltzmann calculations of the density gradient expanded energy distribution functions of electron swarms in gases," J. Phys. D, Appl. Phys., vol. 18, no. 6, pp. 1087-1100, Jun. 1985.
4. Z. L. Petrović, Z. M. Raspopović, V. D. Stojanović, J. V. Jovanović, G. Malović, T. Makabe, and J. de Urquijo, "Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies," Appl. Surf. Sci., vol. 253, no. 16, pp. 6619-6640, Jun. 2007.
5. 2 for energies from 0.1 eV to 10 keV," J. Phys. Chem. Ref. Data, vol. 19, no. 3, pp. 653-675, May 1990.
6. - sources," Rev. Sci. Instrum., vol. 75, no. 5, pp. 1754-1756, May 2004.
7. - production in plasma of dc glow discharge," in Proc. J. Phys.: Conf. Series, 2006, vol. 44, pp. 162-168.
8. Y. Belchenko, I. Gusev, A. Khilchenko, A. Kvashnin, V. Rashchenko, A. Sanin, V. Savkin, and P. Zubarev, "Advanced direct current negativeion source for accelerator use," Rev. Sci. Instrum., vol. 77, no. 3, p. 03A 527, Mar. 2006.
9. S. Longo and P. Diomede, "Monte Carlo modeling of gas phase ion transport under thermal gradients and external fields," Eur. Phys. J., Appl. Phys., vol. 26, no. 3, pp. 177-185, Jun. 2004.
10. S. Longo, "Monte Carlo simulation of charged species kinetics in weakly ionized gases," Plasma Sources Sci. Technol., vol. 15, no. 4, pp. S181-S188, Nov. 2006.
11. - with hydrogen molecules," At. Data Nucl. Data Tables, vol. 76, no. 1, pp. 1-25, Sep. 2000.
12. A. V. Eletskii, "Elementary processes in gases and plasmas," in Handbook of Physical Quantities, I. S. Grigoriev and E. Z. Meilikhov, Eds. Boca Raton, FL: CRC Press, 1997, pp. 489-514. (Tab.18.11, pag. 498).
13. E. M. Lifshitz and L. P. Pitaevskii, Physical Kinetics. New York: Pergamon, 1981, p. 171.
14. O. Fukumasa and R. Nishida, "Modelling of negative ion transport in caesium-seeded volume negative ion sources," Nucl. Fusion, vol. 46, no. 6, pp. S275-S280, Jun. 2006.
15. R. A. Stern, P. Devynck, M. Bacal, P. Berlemont, and F. Hillion, "Nonresonant optical tagging and "monopolar" transport in negativeion plasmas," Phys. Rev. A, Gen. Phys., vol. 41, no. 6, pp. 3307-3320, Mar. 1990.
16. G. L. Braglia, L. Romano, and M. Diligenti, "Comment on 'Comparative calculations of electron-swarm properties in N2 at moderate E/N values'," Phys. Rev. A, Gen. Phys., vol. 26, no. 6, pp. 3689-3694, Dec. 1982.
17. M. Yousfi, A. Hennad, and A. Alkaa, "Monte Carlo simulation of electron swarms at low reduced electric fields," Phys. Rev. E, Stat. Phys. Plasmas Fluids Relat. Interdiscip. Top., vol. 49, no. 4, pp. 3264-3273, Apr. 1994.
18. A. Hatayama, K. Makino, T. Sakurabayasi, K. Miyamoto, M. Ogasawara, and M. Bacal, "Numerical analysis of negative ion temperature in a negative ion source," Rev. Sci. Instrum., vol. 75, no. 5, pp. 1650-1652, May 2004.
19. - destruction by mutual neutralization in low-pressure plasmas," J. Appl. Phys., vol. 57, no. 9, pp. 4342-4348, May 1985.