Nanomeasuring and nanopositioning engineering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6280 I, Issue , 2006, Pages

  Jager G ^a   Hausotte, T ^a   Manske, E ^a   Buchner H J ^a   Mastylo, R ^a   Dorozhovets, N ^a   Hofmann, N ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Nanometrology; Nanoprobes; NPM Machines; Plan mirror interferometers

Indexed keywords

BIOTECHNOLOGY; INTERFEROMETERS; MIRRORS; OPTICAL RESOLVING POWER; PRECISION ENGINEERING; SENSORS;

NANOMETROLOGY; NANOPROBES; NPM-MACHINES; PLAN MIRROR INTERFEROMETERS;

NANOTECHNOLOGY;

EID: 33846177194     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.715237     Document Type: Conference Paper

References (6)

1. G. Jäger, E. Manske, T. Hausotte, W. Schott: Operation and analysis of a nanopositioning and nanomeasuring machine, Proceedings of the 17th Annual Meeting of the ASPE, St. Louis, Missouri, USA, 2002, S. 299 - 304.
2. G. Jäger, E. Manske, T. Hausotte, H. Büchner, R. Grünwald, R. Füßl: Application of miniature interferometers to nanomeasuring and nanopositioning devices, Proceedings of the Conference Scanning Probe Microscopy, Sensors and Nanostructures (TEDA), Beijing, China, Mai 2004, S. 23 - 24.
3. G. Jaßger, E. Manske, T. Hausotte, R. Füßl, R. Grünwald, H. Büchner, W. Schott, D. Dontsov: Miniature interferometers developed for applications in nano-devices, Proceedings of the 7th International Conference on Mechatronic Technology, ICMT 2003 Taipei, Taiwan, December 2003, S. 41 - 45.
4. H.-J. Büchner; G. Jäger: Interferometrische Messverfahren zur berührungslosen und quasi punktförmigen Antastung von Messoberflächen; Technisches Messen, 59 (1992) 2, S. 43 - 47.
5. H.-J. Büchner; G. Jäger: Plan mirror interferometer for precision lenght measurements; Proceedings of the euspen-Conference 2005, Mai 2005, Montpellier, Frankreich, S. 45 - 48
6. R. Mastylo; E. Manske; G. Jäger: Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine; OPTO 2004, 25.-27.05.2004; Nürnberg, Proceedings, S. 123 - 126.