Field Programmable Analog Array (FPAA) based control of an atomic force microscope

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2690-2695

  Schitter, Georg ^a   Phan, Nghi ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; EXTREME ULTRAVIOLET LITHOGRAPHY; TELECOMMUNICATION SYSTEMS;

ANALOG IMPLEMENTATION; ATOMIC FORCE MICROSCOPE; CONTROL HARDWARES; FEEDBACK CONTROLLERS; FIELD PROGRAMMABLE ANALOG ARRAY; HIGH SPEEDS; MODEL-BASED CONTROL; MODEL-BASED CONTROLLERS; TOPOGRAPHY MEASUREMENTS;

IMAGING TECHNIQUES;

EID: 52449110052     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586899     Document Type: Conference Paper

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