The 1.7 kilogram microchip: Energy and material use in the production of semiconductor devices

Environmental Science and Technology

Volumn 36, Issue 24, 2002, Pages 5504-5510

  Williams, Eric D ^a   Ayres, Robert U ^b   Heller, Miriam ^c  

^a UNITED NATIONS UNIVERSITY   (Japan)

^b INSEAD   (France)

^c NATIONAL SCIENCE FOUNDATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENTROPY; ENVIRONMENTAL IMPACT; FABRICATION; FOSSIL FUELS; SEMICONDUCTOR DEVICES; SILICON;

MICROCHIPS;

ENVIRONMENTAL ENGINEERING;

AMMONIA; ARGON; FOSSIL FUEL; HYDROCHLORIC ACID; NITRIC ACID; NITROGEN; OXYGEN; PHOSPHORIC ACID; SILICON; SULFURIC ACID; WATER; SILICON DIOXIDE;

SEMICONDUCTOR INDUSTRY;

ARTICLE; ATMOSPHERIC TRANSPORT; ELECTRICITY; ELECTRONICS INDUSTRY; ENERGY; ENTROPY; ENVIRONMENTAL IMPACT; INTEGRATED CIRCUIT; SEMICONDUCTOR; WATER CONTAMINATION; COMPUTER; ENVIRONMENT; ENVIRONMENTAL MONITORING; GAS; MATERIALS; METHODOLOGY; TECHNOLOGY;

COMPUTERS; ENVIRONMENT; ENVIRONMENTAL MONITORING; FOSSIL FUELS; GASES; MANUFACTURED MATERIALS; NITROGEN; QUARTZ; SEMICONDUCTORS; SILICON; TECHNOLOGY; WATER;

EID: 0037115001     PISSN: 0013936X     EISSN: None     Source Type: Journal    
DOI: 10.1021/es025643o     Document Type: Article

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