Chapter 2 Present and Future Hexapole Aberration Correctors for High-Resolution Electron Microscopy

Advances in Imaging and Electron Physics

Volumn 153, Issue , 2008, Pages 43-119

  Haider, Maximilian ^a   Müller, Heiko ^a   Uhlemann, Stephan ^a  

^a CEOS Corrected Electron Optical Systems GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRONS; OPTICAL SYSTEMS; TRANSMISSION ELECTRON MICROSCOPY;

ABERRATION CORRECTORS; ELECTROMAGNETIC LENS; INSTRUMENTAL RESOLUTION; MAGNIFIED IMAGES; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SCATTERED WAVES; SHAPED ILLUMINATION; SPATIAL INFORMATIONS;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 67649388377     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1076-5670(08)01002-1     Document Type: Chapter

References (52)

1. Beck V.D. A hexapole spherical aberration corrector. Optik 53 (1979) 241-255
2. Crewe A.V. Studies on sextupole correctors. Optik 57 (1980) 313-327
3. Crewe A.V. Asystem for the correction of axial aperture aberrations in electron lenses. Optik 60 (1982) 271-281
4. Crewe A.V. Some Chicago aberrations. Microsc. Microanal. 8 (2002) 4-5
5. Crewe A.V., and Kopf D. Limitation of sextupole correctors. Optik 56 (1980) 391-399
6. Essers, E, Benner G., Orchowski, A., Kappel, R., and Trunz, M. (2002). New approach for ultra-stable TEM column support frame. Proceedings of 15th International Congress on Electron Microscopy, Durban, South Africa, pp. 355-356.
7. Freitag B., Kujawa S., Mul P.M., and Ringnalda J. Breaking the spherical and chromatic aberration barrier in TEM. Ultramicroscopy 102 (2005) 209-214
8. Haider M. Electron microscope development and STEM application. EMBL Research Reports (1990) 142-146
9. Haider M., Bernhardt W., and Rose H. Design and test of an electric and magnetic dodecapole lens. Optik 63 (1982) 9-23
10. Haider M., Braunshausen G., and Schwan E. Correction of the spherical aberration of a 200kV TEM by means of a hexapole corrector. Optik 99 (1995) 167-179
11. s-corrected ultrahigh-resolution TEM. Ultramicroscopy 108 (2008) 167-178
12. Haider M., Uhlemann S., and Zach J. Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM. Ultramicroscopy 81 (2000) 163-175
13. Haider M., Uhlemann S., Schwan E., Rose H., Kabius B., and Urban K. Electron microscopy image enhanced. Nature 392 (1998) 768-769
14. s-correctors. In: Van Dyck D., and Oostveldt P. (Eds). Proceedings 13th European Microscopy Congress vol. I (2004), Belgian Society for Microscopy, Antwerp 41-42
15. s-corrector. Micros. Microanal. 13 (2007) 1148-1149
16. s correction in HRTEM. Proceeding of 14th European Microscopy Congress, Aachen, Germany.
17. Hosokawa, F. (2004). Spherical aberration corrector for electron microscope. United States Patent, US 6836373B2.
18. Hutchison J.L., Titchmarsh J.M., Cockayne D.J.H., Doole R.C., Hetherington C.J.D., Kirkland A.I., and Sawada H. A versatile double aberration-corrected energy filtered HREM/STEM for materials science. Ultramicroscopy 103 (2005) 7-15
19. Jia C.L., Lentzen M., and Urban K. Atomic-resolution imaging of oxygen in perovskite ceracmics. Science 299 (2003) 870-873
20. Jia C.L., Lentzen M., and Urban K. High-resolution transmission electron microscopy using negative spherical aberration. Microsc. Microanal. 10 (2004) 174-184
21. Kazumori H., Honda K., Matsuya M., Date M., and Nielsen C. Field emission SEM with a spherical and chromatic aberration corrector. Microsc. Microanal. 10 (2004) 1370-1371
22. Kimoto K., Nakamura K., Aizawa S., Isakozawa S., and Matsui Y. Development of dedicated STEM with high stability. J. Electron Microsc. 56 1 (2007) 17-20
23. Kisielowski C., Freitag B., Bischoff M., van Lin H., Lazar S., Knippels G., Tiemeijer P., van der Stam M., von Harrach S., Stekelenburg M., Haider M., Uhlemann S., Müller H., Hartel P., Kabius B., Miller D., Petrov I., Olson E.A., Donchev T., Kenik E.A., Lupini A.R., Bentley J., Pennycook S.J., Anderson I.M., Minor A.M., Schmid A.K., Duden T., Radmilovic V., Ramasse Q.M., Watanabe M., Erni R., Stach E.A., Denes P., and Dah-men U. Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5 Åinformation limit. Microsc. Microanal. 14 (2008) 454-462
24. Knoll M., and Ruska E. Das Elektronenmikroskop. Z. Physik 78 (1932) 318-339
25. Koops H., Kuck G., and Scherzer O. Erprobung eines elektronenoptischen Achromators. Optik 48 (1977) 225-236
26. Müller, H., Uhlemann, S., Hartel, P., and Haider, M. (2005). Optical design, simulation and alignment of present-day and future aberration correctors for the TEM. Proceedings of Microscopy Conference, Davos, Switzerland.
27. s-corrector for the the STEM. Microsc. Microanal. 12 (2006) 442-455
28. Müller, H., Uhlemann, S., Hartel P., and Haider M. (2006b). Aberration corrected optics: from an idea to a device. In Proceedings of 7th International Conference on Charged Particle Optics (Munro, E., Rouse, J., Eds.) Physics Procedia 1(1), 167-178.
29. Phillipp F., Höschen R., Osaki M., Möbus G., and Rühle M. New high-voltage atomic resolution microscope approaching 0.1nm point resolution installed in Stuttgart. Ultramicroscopy 56 (1994) 1-10
30. Rose H. Abbildungseigenschaften sphärisch korrigierter elektrononoptischer Achromate. Optik 33 (1971) 1-24
31. Rose H. Elektronenoptische Aplanate. Optik 34 (1971) 285-311
32. Rose H. Correction of aperture aberrations in magnetic systems with threefold symmetry. Nucl. Instr. Meth. 187 (1981) 187-199
33. Rose, H. (1989). Private communication.
34. Rose H. Outline of a spherically corrected semi-aplanatic medium-voltage transmission electron microscope. Optik 85 (1990) 19-24
35. Rose H. Advances in electron optics. In: Ernst F., and Rühle M. (Eds). "High-Resolution Imaging and Spectroscopy of Materials" (2002), Springer Verlag, Berlin 189-269
36. Rose H. Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses. Nucl. Instr. Meth. A 519 (2004) 12-27
37. Rose, H. (2005). Private communication.
38. Rose H., Haider M., and Urban K. Elektronenmikroskopie mit atomarer Auflösung. Phys. Bl. 54 5 (1998) 411-416
39. Sawada, H. (2008). Private communication.
40. Sawada H., Tomita T., Naruse M., Honda T., Hambridge P., Hartel P., Haider M., Hetherington C., Doole R., Kirkland A., Hutchison J., Titchmarsh J., and Cockayne D. Experimental evaluation of a spherical aberration-corrected TEM and STEM. J. Electron Microsc. 54 (2005) 119-121
41. Scherzer O. Über einige Fehler von Elektronenlinsen. Z. Phys. 101 (1936) 593-603
42. Scherzer O. Sphärische und chromatische Korrektur von Elektronenlinsen. Optik 2 (1947) 114-132
43. Schlossmacher P., Matjevic M., Thesen A., and Benner G. Breaking through the Barrier. Imaging & Microscopy 2/2005 (2005) 50-52
44. Shao Z. On the fifth-order aberration in a sextupole corrected probe forming system. Rev. Sci. Instrum. 59 (1988) 2429-2437
45. Tiemeijer P.C. Measurement of Coulomb interactions in an electron beam monochromator. Ultramicroscopy 78 (1999) 53-62
46. Uhlemann S., and Haider M. Residual wave aberrations in the first spherical aberration corrected transmission electron microscope. Ultramicroscopy 72 (1998) 109-119
47. Uhlemann S., and Haider M. Experimental set-up of a fully electrostatic monochromator for a 200kV TEM. In: Engelbrecht J., Sewell T., Witcomb M., Cross R., and Richards P. (Eds). Proceedings 15th International Congress on Electron Microscopy vol. I (2002), Microscopy Society of Southern Africa, Durban 327-328
48. Van der Stam M., Stekelenburg M., Freitag B., Hubert D., and Ringnalda J. A new aberration-corrected transmission electron microscope for a new era. Microscopy and Analysis 19 4 (2005) 9-11
49. Walther T., and Stegmann H. Preliminary results from the first monochromated and aberration corrected 200 kV field-emission scanning transmission electron microscope. Microsc. Microanal. 12 (2006) 498-505
50. Zach J. Design of a high-resolution low-voltage scanning electron microscope. Optik 83 (1989) 30-40
51. Zach J., and Haider M. Correction of spherical and chromatic aberration in a low voltage SEM. Optik 98 (1995) 112-118
52. Zemlin F., Weiss K., Schiske P., Kunath W., and Herrmann K.-H. Coma-free alignment of high-resolution electron microscopes with the aid of optical diffractograms. Ultramicroscopy 3 (1978) 49-60