Aberration-corrected optics: From an idea to a device

Physics Procedia

Volumn 1, Issue 1, 2008, Pages 167-178

  Müller, Heiko ^a   Uhlemann, Stephan ^a   Hartel, Peter ^a   Haider, Maximilian ^a  

^a CEOS Corrected Electron Optical Systems GmbH   (Germany)

Author keywords

Aberration correctors; Computational methods; Field calculation; Hexapole corrector; Optical alignment; Tolerancing

Indexed keywords

EID: 54149115534     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2008.07.093     Document Type: Conference Paper

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