Field emission SEM with a spherical and chromatic aberration corrector

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 1370-1371

  Kazumori, H ^a   Honda, K ^a   Matsuya, M ^a   Date, M ^a   Nielsen, C ^b  

^a JEOL LTD   (Japan)

^b JEOL USA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544242111     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604881352     Document Type: Conference Paper

References (3)

1. J. Zach and M. Haider, Nucl. Instrum. Methods Phys. Res.,. Sect. A 363 (1995) 316-325.
2. J. Zach, Optik, 83, No.1 (1989) 30-40.
3. K. Honda and S. Takashima, JEOL News, Vol.38 (2003) 36-40.