Development of dedicated STEM with high stability

Journal of Electron Microscopy

Volumn 56, Issue 1, 2007, Pages 17-20

  Kimoto, Koji ^a   Nakamura, Kuniyasu ^b   Aizawa, Shinji ^b   Isakozawa, Shigeto ^b   Matsui, Yoshio ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Annular dark field; Cold field emission electron gun; Electron energy loss spectroscopy; Scanning transmission electron microscopy

Indexed keywords

ABERRATIONS; ACCELERATION; ELECTRON ENERGY LEVELS; ELECTRON GUNS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

ACCELERATION VOLTAGES; ANNULAR DARK FIELD; COLD-FIELD EMISSION ELECTRON GUNS; DARK-FIELD; DRIFT RATES; ELECTRON ENERGY-LOSS SPECTROSCOPIES; ELECTRONIC STABILITY; MECHANICAL; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SCANNING TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 34047237921     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfl043     Document Type: Article

References (10)

1. Pennycook S J, and Boatner L A (1988) Chemically sensitive structure-imaging with a scanning transmission electron microscope. Nature 336: 565-567.
2. Egerton R F (1996) Electron Energy-Loss Spectroscopy in the Electron Microscope. 2nd edn, (Plenum Press, New York).
3. Ann C C (2004) Transmission Electron Energy Loss Spectrometry in Materials Science, the EELS Atlas, (John Wiley & Sons Inc, New York).
4. Spence J C H (2003) High-Resolution Electron Microscopy. 3rd edn., (Oxford University Press, New York).
5. Kimoto K, and Matsui Y (2002) Software techniques for EELS to realize about 0.3 eV energy resolution using 300 kV FEG-TEM. J. Microsc. 208: 224-228.
6. Kimoto K, Ishizuka K, Asaka T, Nagai T, and Matsui Y (2005) 0.23 eV energy resolution obtained using a cold field-emission gun and a streak imaging technique. Micron 36: 465-469.
7. Muller D A, and Grazul J (2001) Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy. J. Electron Microsc. 50: 219-226.
8. Kimoto K, Anan Y, Asaka T, Zhigadlo N D, Muromachi E, and Matsui Y (2001) Light element analysis in oxycarbonate superconductors using EELS. J. Electron Microsc. 50: 307-310.
9. 23 ELNES with resolution-enhancement software and first-principles calculation. J. Electron Microsc. 52: 299-303.
10. Ishizuka K, and Abe E (2004) Improvement of Spatial Resolution of STEM-HAADF Image by Maximum-Entropy and Richardson-Lucy Deconvolution. Proceedings of the EMC2004, pp. 117-118 (Belgian Society for Microscopy, Amsterdam).