Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr 0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics

Advanced Functional Materials

Volumn 15, Issue 12, 2005, Pages 2021-2028

  Park, Jae Hong ^a,c   Kwon, Tae Yun ^a,b   Yoon, Dae Sung ^a   Kim, Hwan ^c   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTROCHEMISTRY; LEAD COMPOUNDS; MELTING; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS; PIEZOELECTRIC DEVICES; SILICON; TEMPERATURE DISTRIBUTION; THICK FILMS;

MICROCANTILEVER SENSORS; PROCESSING TEMPERATURES; PZT THICK FILMS;

MICROSENSORS;

EID: 29144436612     PISSN: 1616301X     EISSN: None     Source Type: Journal    
DOI: 10.1002/adfm.200500331     Document Type: Article

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