A two-dimensional f-è micro optical lens scanner with electrostatic comb-drive XY-stage

ieice electronics express

Volumn 2, Issue 21, 2005, Pages 542-547

  Takahashi, Kazuhiro ^a,b   Kwon, Ho Nam ^a,c   Saruta, Kunihiko ^a,d   Mita, Makoto ^e   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a,b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c Gwangju Institute of Science and Technology (GIST)   (South Korea)

^d SONY CORPORATION   (Japan)

^e JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

2D optical scanner; actuator; double gimbal XY stage; electrostatic micro; MEMS; micro lens

Indexed keywords

EID: 85009561329     PISSN: 13492543     EISSN: None     Source Type: Journal    
DOI: 10.1587/elex.2.542     Document Type: Article

References (9)

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