A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning. Part 2: Dynamics, control and performance analysis

Precision Engineering

Volumn 32, Issue 1, 2008, Pages 20-33

  Dong, Jingyan ^a   Yao, Qing ^a   Ferreira, Placid M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Contouring errors; Flexure stage; Motion control; Nano positioning; Parallel kinematics

Indexed keywords

ACTUATORS; CALIBRATION; CONTOUR MEASUREMENT; KINEMATICS;

CONTOURING ERRORS; FLEXURE STAGE; FRAGILE KINEMATIC CALIBRATION; NANOPOSITIONING; PARALLEL KINEMATICS;

MOTION CONTROL;

EID: 35748946638     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.03.002     Document Type: Article

References (6)

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