Reproducibility of nano- and micro-scale multi-point probe sheet resistance measurements

Materials Research Society Symposium - Proceedings

Volumn 738, Issue , 2003, Pages 157-162

  Petersen, Christian L ^a   Worledge, Daniel ^b   Petersen, Peter R E ^c  

^a Capres A/S   (Canada)

^b IBM   (United States)

^c Capres AS   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; GOLD; SILICA; SURFACE PROPERTIES; THIN FILMS;

SHEET RESISTANCE;

MATERIALS SCIENCE;

EID: 0038310911     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. L. J. van der Pauw, Phillips Tech. Rev. 20 220 (1958).