Fabrication and evaluation of 3D-electric micro filters using proton beam writing

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1396-1400

  Furuta, Yusuke ^a   Nishikawa, Hiroyuki ^a   Satoh, Takahiro ^b   Ishii, Yasuyuki ^b   Kamiya, Tomihiro ^b   Nakao, Ryota ^c   Uchida, Satoshi ^c  

^a SHIBAURA INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

DEP; Electric micro filter; High aspect ratio pillar array; PBW; SU 8

Indexed keywords

DEP; ELECTRIC MICRO FILTER; HIGH-ASPECT-RATIO PILLAR ARRAY; PBW; SU-8;

ASPECT RATIO; CONCURRENT ENGINEERING; ELECTRIC FIELDS; ELECTROPHORESIS; ESCHERICHIA COLI; ION BEAM LITHOGRAPHY; JOB ANALYSIS; PLANTS (BOTANY); PROTON BEAMS; PROTONS; RAPID PROTOTYPING; SILICA; THICKNESS MEASUREMENT;

DIELECTRIC DEVICES;

EID: 67349256854     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.065     Document Type: Article

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