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Volumn 25, Issue 6, 2007, Pages 2171-2174

Fabrication of three-dimensional structures of resist by proton beam writing

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRIC RESISTANCE; MICROFABRICATION; MICROMACHINING; PARTICLE ACCELERATORS; SILICON; THREE DIMENSIONAL; VOLTAGE CONTROL;

EID: 37149049907     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2806974     Document Type: Article
Times cited : (21)

References (15)
  • 5
    • 37149011586 scopus 로고    scopus 로고
    • D. Drouin, CASINO (http://www.gel.usherb.ca/casino/index.html).
    • Drouin, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.