Integrating photonic and microfluidic structures on a device fabricated using proton beam writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Bettiol, A A ^a   Teo, E J ^a   Udalagama, C N B ^a   Venugopal Rao, S ^b   Van Kan, J A ^a   Shao, P G ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI   (India)

Author keywords

Glass; Microfluidics; Proton beam writing; Waveguides

Indexed keywords

GLASS; LITHOGRAPHY; MICROSTRUCTURE; OPTICAL WAVEGUIDES; PROTONS; REFRACTIVE INDEX;

ELECTRON VOLT BEAM; ENERGETIC PROTONS; MICROFLUIDICS; PROTON BEAM WRITING;

FLUIDIC DEVICES;

EID: 33746770486     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662495     Document Type: Conference Paper

References (24)

1. D. A. Cohen, J. Nolde, C. Wang, E. Skogen, A. Rivlin, and L. Coldren, "Biophotonic integrated circuits," Proceedings of SPIE 5594, pp. 81-93, 2004.
2. H. Qiao, S. Goel, A. Grundmann, and J. McMullin, "Biochips with integrated optics and fluidics," Proceedings of SPIE 5062, pp. 873-878, 2002.
3. S. Goel, H. Qiao, A. Grundmann, and J. McMullin, "Fabrication of micro-optic/microfluidic biochips," Proceedings of SPIE 4833, pp. 54-59, 2002.
4. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, "Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser," Opt. Lett. 28, p. 55, 2003.
5. F. Watt, J. van Kan, and T. Osipowicz, "Three-dimensional micro fabrication using mask less irradiation with mev ion beams: proton beam micromachining," MRS Bulletin 25, pp. 33-38, 2000.
6. T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Kramer, and B. Speit, "Fabrication technologies for microsystems utilizing photoetchable glass," Microelec. Eng. 30, pp. 497-504, 1996.
7. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, "3d microstructuring inside photosensitive glass by femtosecond laser excitation," Appl. Phys. A 76, pp. 857-860, 2003.
8. J. Kim, H. Berberoglu, and X. Xu, "Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers," J. Microlith. Microfab. Microsyst. 3, pp. 478-485, 2004.
9. S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, pp. 1549-1553, 2004.
10. M. Abraham, I. Gomez-Morilla, M. Marsh, and G. Grime, "Proton induced structuring of a photostructurable glass," Mat. Res. Soc. Proc 739, p. H2.8.1, 2003.
11. I. Rajta, I. Gomez-Morilla, M. H. Abraham, and A. Z. Kiss, "Proton beam micromachining on pmma, foturan and cr-39 materials," Nucl. Instr. Meth. B 210, pp. 260-265, 2003.
12. I. Gomez-Morilla, M. H. Abraham, D. G. de Kerckhove, and G. W. Grime, "Micropatterning of foturan photosensitive glass following exposure to mev proton beams," J. Micromech. Microeng. 15, pp. 706-709, 2005.
13. A. C. Fisher, K. A. Gooch, I. E. Henley, and K. Yunus, "Voltammetry under microftuidic control," Analytical Sci. 17, p. 1371, 2001.
14. K. Sugioka, Y. Cheng, and K. Midorikawa, "3D micromachining of photosensitive glass by femtosecond laser for microreactor manufacture," Journal of Photopolymer Science And Technology 17, pp. 397-402, 2004.
15. V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, "Femtosecond laser-induced refractive index modification in multicomponent glasses," Jour. Appl. Phys. 97, p. 083102, 2005.
16. Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, "Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser," Optics Express 11, pp. 1809-1816, 2003.
17. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, "Three dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser," Opt. Lett. 28, p. 1144, 2003.
18. S. V. Rao, K. Moutzouris. M. Ebrahimzadeh, A. D. Rossi, M. Calligaro, V. Ortiz, G. Ginitz, and V. Berger, "Measurements of optical loss in gaas/al2o3 nonlinear waveguides in the infrared using femtosecond scattering technique," Opt. Commun. 213, p. 223, 2002.
19. J. F. Ziegler, "Srim 2003," Nucl. Instrum. Meth. B 219-220, p. 1027, 2004.
20. T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, "Proton beam writing of low loss polymer optical waveguides," Appl. Phys. Lett. 83, p. 1707, 2003.
21. T. C. Sum, A. A. Bettiol, H. L. Seng, I. Rajta, J. A. van Kan, and F. Watt, "Proton beam writing of passive waveguides in pmma." Nucl. Instrum. Meth. B 210, p. 266, 2003.
22. A. Roberts and M. von Bibra, "Fabrication of buried channel waveguides in fused silica using focused mev proton beam irradiation," J. Lightwave Tech 14, pp. 2554-2557, 1996.
23. M. von Bibra and A. Roberts, "Refractive index reconstruction of graded index buried channel waveguides from their mode intensities," J. Lightwave Tech 15, pp. 1695-1699, 1997.
24. K. Liu. E. Y. B. Pun, T. C. Sum, A. A. Bettiol, J. A. van Kan, and F. Watt, "Erbium doped waveguide amplifiers fabricated using focused proton beam direct-writing," Appl. Phys. Lett 84, p. 684, 2004.